Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
61 (1992), S. 3041-3043
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We present an improved reaction patterning technique to fabricate very stable thin film devices of YBaCuO on various substrates. Our approach includes in situ patterning and completely avoids the contact between YBaCuO superconductor and chemical or physical etchants. Very thin, high quality YBaCuO structures are grown on ridges or in trenches and in situ protected by passivating layers, demonstrating excellent long term stability.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.108003
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