Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
68 (1997), S. 2486-2489
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Scanning probe microscopies need actuators to produce controlled displacements of surfaces in the nanoscale range. Usually piezoelectric ceramics are used for this function. In this article, we describe a magnetic way to produce a similar movement without the use of high voltage. The position is obtained with a precision lower than 10 pm in the range of a hundred micrometers and a bandwidth of 1 kHz. All the parameters of this system can be accurately and easily determined. The knowledge of an analytical form of the transient response of the actuator makes the calibration of the position sensor needless. The direct measurement of the position of the magnet gives entirely reliable results. This actuator could be, for example, applied to atomic force microscopy where a good precision in displacement is required to get force/distance curves or surface images. © 1997 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1148146
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