ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
We investigated the effect of SiO[removed info]cap layer on the thermal stability of nickel andnickel-cobalt silicide by measuring its sheet resistance. The stability of nickel silicide wasdeteriorated as a function of annealing temperature, while that of nickel-cobalt silicide was not. Incase of both silicides, the SiO[removed info]cap layer improved the stability. Tensile stress from the difference ofthermal expansion coefficients between SiO2 and nickel silicide may suppress the agglomeration ofnickel silicide
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/51/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.321-323.1322.pdf
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