Electronic Resource
s.l. ; Stafa-Zurich, Switzerland
Advances in science and technology
Vol. 51 (Oct. 2006), p. 121-126
ISSN:
1662-0356
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Natural Sciences in General
,
Technology
Notes:
A study was made on the micromachining of GaAs in a H3PO4:H2O2:H2O solution withcomposition 1:9:1. In the first part etch rates and morphologies of etched structures were evaluatedin order to characterize the anisotropy. The second part was devoted to numerical simulations of 3Detching shapes. For this purpose the database of the simulator TENSOSIM was determined.Comparison of theoretical 3D etching shapes with experimental shapes of micromachined structuressupports the validity of the proposed database. So the simulator TENSOSIM is a convenient CAOtool for the design of new GaAs MEMS
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/42/transtech_doi~10.4028%252Fwww.scientific.net%252FAST.51.121.pdf
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