Electronic Resource
s.l. ; Stafa-Zurich, Switzerland
Advances in science and technology
Vol. 54 (Sept. 2008), p. 428-433
ISSN:
1662-0356
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Natural Sciences in General
,
Technology
Notes:
This paper reports on the design of piezoresistive GaAs sensors and focuses on nonconventional orientations. The piezoresistive detection of in-plane longitudinal and shear stresses isstudied to determine the best orientations for pressure and force sensors. Simulation of shapes formicromachined membranes and cantilevers allows us to select some (hk0) orientations for whichthe sensitivity is evaluated
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/42/transtech_doi~10.4028%252Fwww.scientific.net%252FAST.54.428.pdf
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