Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
66 (1989), S. 6176-6178
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A model for Si diffusion into GaAs based on the formation of Si+Ga-V−Ga pairs is developed. The model follows the formalism developed by M. E. Greiner and J. F. Gibbons [Appl. Phys. Lett. 44, 750 (1984)]. Using recently derived values for the Ga vacancy diffusivity, it is shown that the pair diffusion coefficient is approximately equal to three-quarters its value. The results of the model are demonstrated to be in good agreement with the Si diffusion data.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.343602
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