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  • 1
    Electronic Resource
    Electronic Resource
    A generalized plasma etching model (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 64 (1988), S. 4199-4207 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A generalized plasma etching model has been developed. The new model is a generalization of our previous model presented in a recent paper [E. Zawaideh and N. S. Kim, J. Appl. Phys. 62, 2498 (1987)]. The new model includes the effects of multi-ion and multineutral gas species. New generalized plasma transport equations are also introduced. These equations are derived for multi-ion species. No restrictions on the anisotropy of the ion distribution functions are imposed. The new generalized plasma transport equations are valid for collisional to weakly collisional plasma [λ/L≤0(1)], where λ is the ion mean free path and L is the smallest of the scale lengths of the gradient in the electric field or in the macroscopic plasma parameters. A new particle balance model has also been introduced which incorporates the effects of gas composition, gas flowrate, pumping rate, ion and neutral gas chemistry, and atomic reactions on the neutral gas and plasma parameters (e.g., densities and pressures of the various neutral gas and plasma species). As an example, silicon dioxide (SiO2) plasma etching using carbon tetrafluoride (CF4) gas is used to illustrate this new generalized model. The model has shown good agreement with the experimental etch rates of SiO2 for various plasma and reactor parameters (e.g., neutral gas pressure, CF4 flowrate, and rf power).
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.341335
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  • 2
    Electronic Resource
    Electronic Resource
    The Giemsa C-Banded Karyotype of Canada Wildrye (Elymus canadensis) (1990)
    Oxford, UK : Blackwell Publishing Ltd
    Plant breeding 104 (1990), S. 0 
    Details
    ISSN: 1439-0523
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Agriculture, Forestry, Horticulture, Fishery, Domestic Science, Nutrition
    Notes: Karyotype of Canada wildrye (Elymus canadenisis L.) was described using giemsa C-banding techniques. Most of the chromosomes showed dome banding pattern polymorphism. Small to large terminal and centormere bands were observed in most of the chromosomes. A faint satellite was observed in one chromosome. Tow chromosomes had a large interstitial band near the centromeres in the long arms. The Giemsa C-banding pattern of E. Canadensis is compared to that of Pseudoroegneria spicata and Critesion boddanii to illustrate species relationship.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1111/j.1439-0523.1990.tb00430.x
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  • 3
    Electronic Resource
    Electronic Resource
    Reply to the comments of Riemann and van den Berg (1991)
    New York, NY : American Institute of Physics (AIP)
    Physics of Fluids 3 (1991), S. 1302-1303 
    Details
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The comments of Riemann and van den Berg represent a misinterpretation of what was presented by Zawaideh et al. [Phys. Fluids B 2, 647 (1990)]. Namely, they claim that the oscillations in the electric field in the presheath region are a result of incorrect boundary conditions. To disprove their claim, both the sheath and presheath region with no assumption about quasineutrality have been solved self-consistently. To eliminate the issue of incorrect boundary conditions, a symmetrically confined plasma between two floating electrodes was considered. From the self-consistent solution, it is shown that, for subsonic flow, the oscillations in the electric field do exist in the absence of external particle sources and are not due to an incorrect boundary condition.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.859824
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  • 4
    Electronic Resource
    Electronic Resource
    Structure of the plasma sheath in collisional to weakly collisional plasmas (1990)
    New York, NY : American Institute of Physics (AIP)
    Physics of Fluids 2 (1990), S. 647-654 
    Details
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Recently, a set of two fluid equations has been derived that describes the transport of plasmas with anisotropic pressure along the lines of force and is valid for collisional to weakly collisional regimes [Phys. Fluids 29, 463 (1986); 31, 3280 (1988)]. These transport equations coupled with Poisson's equation are used to study the structure of the nonquasineutral transition region between the plasma and the material wall. This transition region is defined as the electric sheath region. The Bohm sheath criteria has been derived by various authors by examining behavior of the solution to the plasma-sheath equation. These investigations have shown that only for a supersonic flow would an increasing electric potential (in magnitude) exist in the sheath region to accelerate the ions further toward the wall. For subsonic flows, the behavior of the electric potential is purely oscillatory, which is not physical (electrons would trap in these potential wells and wipe them out). This work shows that when a more accurate set of equations is used, the solution is purely oscillatory when the flow speed is below the ion "thermal speed.'' For flow velocities in the range between the thermal and sound speed, there exist solutions where the electric field is positive definite and oscillatory but the potential is monotonic. Therefore, solutions to the sheath problem exist for subsonic flow and Bohm's sheath criteria can be violated.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.859299
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  • 5
    Electronic Resource
    Electronic Resource
    Generalized parallel heat transport equations in collisional to weakly collisional plasmas (1988)
    [S.l.] : American Institute of Physics (AIP)
    Physics of Fluids 31 (1988), S. 3280-3285 
    Details
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A new set of two-fluid heat transport equations that is valid from collisional to weakly collisional limits is derived. Starting from gyrokinetic equations in flux coordinates, a set of moment equations describing plasma energy transport along the field lines of a space- and time-dependent magnetic field is derived. No restrictions on the anisotropy of the ion distribution function or collisionality are imposed. In the highly collisional limit, these equations reduce to the classical heat conduction equation (e.g., Spitzer and Härm or Braginskii), while in the weakly collisional limit, they describe a saturated heat flux (flux limited). Numerical examples comparing these equations with conventional heat transport equations show that in the limit where the ratio of the mean free path λ to the scale length of the temperature gradient LT approaches zero, there is no significant difference between the solutions of the new and conventional heat transport equations. As λ/LT→1, the conventional heat conduction equation contains a significantly larger error than (λ/LT)2. The error is found to be O(λ/L)2, where L is the smallest of the scale lengths of the gradient in the magnetic field, or the macroscopic plasma parameters (e.g., velocity scale length, temperature scale length, and density scale length). The accuracy of the flux-limited model depends significantly on the value of the flux limit parameter which, in general, is not known. The new set of equations shows that the flux-limited parameter is a function of the magnetic field and plasma parameter profiles.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.866940
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  • 6
    Electronic Resource
    Electronic Resource
    A plasma etching model based on a generalized transport approach (1987)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 62 (1987), S. 2498-2507 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A plasma etching model for rf-discharge plasma reactors has been developed. The model considers the linear and nonlinear effects on plasma kinetics of atomic effects, ion chemistry, space-charge effects, and the plasma/surface interactions. The linear effects of physical and chemical etching and the nonlinear effects of the "enhanced'' physical and chemical etching, which are due to the plasma/surface interactions, are also discussed. New generalized plasma transport equations are introduced. These equations are valid for collisional to weakly collisional plasmas [λ/L(approximately-less-than)O(1)], where λ is the ion mean free path and L is the smallest of the scale lengths of the gradient in the electric field or in the macroscopic plasma parameters. The transport equations are used to calculate the magnitude and profile of the plasma particle and energy fluxes for the etching model. The model has shown good agreement with experimental etch rates of silicon dioxide, borophosphosilicate glass, and photoresist.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.339461
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  • 7
    Electronic Resource
    Electronic Resource
    A generalized plasma etching model with an oblique magnetic field (1989)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 66 (1989), S. 1113-1121 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A generalized plasma etching model with an oblique magnetic field has been developed. The new model is a continuation of our previous models presented in recent papers [E. Zawaideh and N. S. Kim, J. Appl. Phys. 62, 2498 (1987); 64, 4199 (1988)]. New generalized plasma transport equations that are valid in the limit of large drifts (e.g., E×B drift, where E and B are the electric and magnetic field vectors, respectively) are introduced. These new generalized plasma transport equations are also valid for collisional [λ/L(very-much-less-than)1] to weakly collisional plasmas [λ/L∼0(1)], where λ is the ion mean free path and L is the smallest of the scale lengths of the electric field or the gradient in the macroscopic plasma parameters. The new plasma transport equations coupled with both Poisson's equation and our previous generalized etching equations are used to model the magnetron plasma etching processes. As an example, silicon (Si) plasma etching with a mixture of helium (He) and chlorine (Cl2) gases is applicable to illustrate this new generalized model. The model has shown a definite trend toward agreement with the experimental etch rates of Si for various plasma and reactor parameters (e.g., neutral gas pressure and rf power).
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.343450
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  • 8
    Electronic Resource
    Electronic Resource
    Simulation for static and dynamic performance of a superconducting analog-to-digital converter (1985)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 58 (1985), S. 3515-3518 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The simulation of a superconducting flux counting analog-to-digital (A/D) converter for advanced high-speed signal processing systems is performed to investigate its performance and sensitivity. This report describes the algorithms and the results associated with simulating the whole sequence (count-store-readout-reset-count). Parameter sensitivities are also checked and optimized.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.335777
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  • 9
    Electronic Resource
    Electronic Resource
    Extreme ultraviolet line emission at 24.7 nm from Li-like nitrogen plasma produced by a short KrF excimer laser pulse (1996)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 884-886 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Recently using KrF high power laser (248 nm; 350 fs; 5.0×1016 W/cm2) in the Rutherford Appleton Laboratory an experimental search for recombination extreme ultraviolet (XUV) laser action in Li-like nitrogen ions was performed. To understand the experimental results of line emission at 24.7 nm in the 3d5/2–2p3/2 transition of the Li-like nitrogen ion a simulation was undertaken using a one-dimensional Lagrangian hydrodynamic code. From the simulation results, we confirmed that there was nonlinear dependence of spectral line emission on the gas density which was well matched to the experimental results. Only a six times increase of the 24.7 nm emission intensity was obtained when the plasma length was increased 1000 times from 1 μm as an optically thin case to 1 mm. Also, the spatial profile of the electron density and temperature was obtained and the electron temperature was about 40–50 eV which was too high for the optical field ionization x-ray lasing. We could not find evidence of x-ray laser gain. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.117976
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  • 10
    Electronic Resource
    Electronic Resource
    The effects of β2 adrenoceptor gene polymorphisms 
on pressor response during laryngoscopy and tracheal intubation (2002)
    Oxford, UK : Blackwell Science Ltd
    Anaesthesia 57 (2002), S. 0 
    Details
    ISSN: 1365-2044
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Medicine
    Notes: We investigated whether human β2 adrenoceptor (β2AR) gene polymorphisms are associated with the pressor response to laryngoscopy and tracheal intubation. Ninety-two patients undergoing elective surgery under general anaesthesia were enrolled into this study. Arterial systolic pressure, heart rate and rate pressure product were measured before induction of anaesthesia and 1 min following laryngoscopy and tracheal intubation. Genomic DNA was then used to identify the β2AR-16 and β2AR-27 genes using an allele-specific polymerase chain reaction method. Using multiple linear regression models, controlling for age, sex, weight, baseline blood pressure, heart rate and rate pressure product, we found that patients who possessed the glutamic acid homozygote of β2AR-27 produced significantly greater changes in mean arterial pressure and rate pressure products than patients with the glutamine homozygote of β2AR-27 (β coefficient for mean blood pressure = 11.81, β coefficient for pulse−pressure product = 8.76, both p-values = 0.023). These findings suggest that genetic variability in the human β2AR gene polymorphisms may be associated with the pressor response to laryngoscopy and tracheal intubation.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1046/j.0003-2409.2001.02407.x
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