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1

Digitale Medien

Magnetic shielding of stray magnetic fields in the scanning electron microscope (1994)

Müllerová, I. ; Fišer, J.

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 65 (1994), S. 1968-1972

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ISSN: 1089-7623

Quelle: AIP Digital Archive

Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik

Notizen: A stray magnetic field troubles all designers of electron microscopes. The influence of this field is most critical when an ultrahigh-vacuum low-voltage scanning microscope is to be designed. Transversal components of the stray magnetic field deflect the primary beam, but a stray field of the same value acting along the optical axis does not influence the primary beam significantly. We designed a shielding for our low-voltage scanning electron microscope which suppresses the influence of the transversal stray magnetic field by two orders but does not influence the field of the focusing lens. Therefore, unlike the full shielding of a small diameter, the segmental shielding proposed does not impair resolution.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.1144797

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2

Digitale Medien

Unconventional imaging of surface relief (1993)

Pejchl, D. ; Müllerová, I. ; Frank, L.

Springer

Czechoslovak journal of physics 43 (1993), S. 983-992

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ISSN: 1572-9486

Quelle: Springer Online Journal Archives 1860-2000

Thema: Physik

Notizen: Abstract The topographic contrast in a scanning electron microscope with very slow electrons is examined in case the cathode lens is used for adjusting the landing energy. Measurements are presented regarding the behaviour of planar contrasts at low energies and a significant improvement of the surface detail visualization is demonstrated, together with the possibility of controlling the electron impact angle.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1007/BF01595290

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3

Digitale Medien

Microscopy with slow electrons (1994)

Frank, L. ; Müllerová, I. ; Delong, A.

Springer

Czechoslovak journal of physics 44 (1994), S. 195-238

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ISSN: 1572-9486

Quelle: Springer Online Journal Archives 1860-2000

Thema: Physik

Notizen: Abstract Low energy microscopy is treated as the low energy limit of electron microscopy as a whole in all its basic branches, i.e. the emission, transmission and scanning microscopies. The instrumental and methodological aspects are briefly discussed. These include the interaction of electrons with a solid, the contrast formation mechanisms, the instrumentation problems and actual progress achieved in all three microscopies, from the point of view of lowering the energy of electrons, impacting or leaving the specimen, down to the low energy range below 5 keV and the very low energy range below 50 eV.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1007/BF01694486

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4

Digitale Medien

Separator of primary and signal electrons for very low energy SEM (1994)

Pejchl, D. ; Müllerová, I. ; Frank, L. ; [weitere]

Springer

Czechoslovak journal of physics 44 (1994), S. 269-276

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ISSN: 1572-9486

Quelle: Springer Online Journal Archives 1860-2000

Thema: Physik

Notizen: Abstract High resolution can be obtained in the scanning electron microscope (SEM) for a very low landing energy of electrons, even for that below 50 eV, when a cathode lens is used with the specimen as a cathode held at a high negative potential but the detection of signal electrons is totally different compared with classical SEM. Primary electrons with an energy of the order of tens of keV are decelerated in the field of the cathode lens to a very low landing energy and signal electrons originating in the specimen are accelerated and collimated by the same field to a narrow beam with an electron energy nearly the same as that of the primary beam. To detect these signal electrons we must deflect them from the optical axis without deteriorating the properties of the primary beam. The design of a novel type of separator of the primary and signal electrons consisting of two stages, each of them formed by the electric and magnetic crossed fields, is presented, together with calculated trajectories for both primary and signal electrons.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1007/BF01694491

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