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  • 1
    Digitale Medien
    Digitale Medien
    Separator of primary and signal electrons for very low energy SEM (1994)
    Springer
    Czechoslovak journal of physics 44 (1994), S. 269-276 
    Details
    ISSN: 1572-9486
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Physik
    Notizen: Abstract High resolution can be obtained in the scanning electron microscope (SEM) for a very low landing energy of electrons, even for that below 50 eV, when a cathode lens is used with the specimen as a cathode held at a high negative potential but the detection of signal electrons is totally different compared with classical SEM. Primary electrons with an energy of the order of tens of keV are decelerated in the field of the cathode lens to a very low landing energy and signal electrons originating in the specimen are accelerated and collimated by the same field to a narrow beam with an electron energy nearly the same as that of the primary beam. To detect these signal electrons we must deflect them from the optical axis without deteriorating the properties of the primary beam. The design of a novel type of separator of the primary and signal electrons consisting of two stages, each of them formed by the electric and magnetic crossed fields, is presented, together with calculated trajectories for both primary and signal electrons.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1007/BF01694491
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 2
    Digitale Medien
    Digitale Medien
    Unconventional imaging of surface relief (1993)
    Springer
    Czechoslovak journal of physics 43 (1993), S. 983-992 
    Details
    ISSN: 1572-9486
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Physik
    Notizen: Abstract The topographic contrast in a scanning electron microscope with very slow electrons is examined in case the cathode lens is used for adjusting the landing energy. Measurements are presented regarding the behaviour of planar contrasts at low energies and a significant improvement of the surface detail visualization is demonstrated, together with the possibility of controlling the electron impact angle.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1007/BF01595290
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
    Artikel (Nationallizenzen)
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