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  • 1
    Digitale Medien
    Digitale Medien
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 88 (2000), S. 5612-5617 
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Measurements of ion energy distributions, relative ion intensities, and absolute total ion current densities were made at the grounded electrode of an inductively coupled Gaseous Electronics Conference (GEC) radio-frequency reference cell for discharges generated in CHF3 and its mixtures with argon. In general, the dominant ion species detected were not due to direct ionization of the CHF3 feed gas. Results are presented for plasmas generated with and without a confining quartz annulus that has recently been used to extend the operating parameter range of inductively coupled GEC cells for certain etching gases. Compared to similar plasmas generated without the annulus, the presence of the ring increases the ion flux density by approximately a factor of 2, and increases the mean ion energies. The presence of the ring does not significantly affect the measured relative ion intensities.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 2
    Digitale Medien
    Digitale Medien
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 61 (1987), S. 1276-1287 
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The characterization of a parallel plate apparatus which can produce a unipolar charge density that is suitable for calibrating aspirator-type ion counters operating in the ground plane is described. The influence of a dc electric field, air motion, Coulomb repulsion, and diffusion on the transport of ions into the ion counter are examined to determine their effects on instrument calibration and measurements in the vicinity of high-voltage dc transmission lines. A charge density which is known with an uncertainty of less than ±9% is used to check the performance of an ion counter with and without a duct at its entrance.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 3
    Digitale Medien
    Digitale Medien
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 60 (1989), S. 720-729 
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: Two drift tubes constructed of insulating cylinders with conductive guard rings on the inside walls are examined to determine their suitability for measuring ion mobility spectra at atmospheric pressure. One drift tube is of the pulse time-of-flight (TOF) type with adjustable drift distance, and the other is an ac-TOF drift tube similar in principle to devices reported by Tyndall and Powell [Proc. R. Soc. A 129, 162 (1930)] and Van de Graaff [Philos. Mag. 6, 210 (1928)]. The latter drift tube is evaluated using sinusoidal and alternating-polarity pulse-voltage waveforms for gating the shutters. Methods for determining the drift velocity of an ion from theoretical fits of the TOF spectrum are described for drift tubes of fixed length exhibiting "end effects.'' Mobility values with uncertainties less than ±1% can be obtained with the pulse-TOF drift tube. Comparable results are obtained with the ac drift tube if an alternating-polarity pulse-voltage waveform is used for gating the shutter.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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