ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
A new type of SIMS instrument has been developed for submicron microarea analysis. The instrument is incorporated with an electron beam, which provides scanning electron microscopy (SEM) images of a sample. The operator determines the area to be analysed by observing the SEM image without damaging the sample, then switches the electron beam to an ion beam and carries out a SIMS analysis of that area. Electron and ion Beams with diameters of 〈20 nm and 〈70 nm, respectively, are focused on the sample. Some application data of the micro-area elemental analysis are presented.
Additional Material:
6 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740160122
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