ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A soft x-ray microscope has been developed at the beamline NE1B of the 6.5-GeV TRISTAN Accumulation Ring (AR). It makes use of undulator radiation as its source and a zone plate with the outermost zone width of 50 nm as its imaging element. It has two main features. First, the undulator radiation is monochromatized by a grazing incidence grating monochromator to match to the monochromaticity requirement of the zone plate. Second, a visible light prefocus unit consisting of two objectives has been designed and installed in the x-ray microscope. The x-ray optical system of the microscope can be adjusted easily, quickly, and precisely by using this unit. The microscope can resolve 55-nm lines and spaces in a zone plate test pattern. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1145987
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