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  • 1
    Electronic Resource
    Electronic Resource
    Model of a two-stage rf plasma reactor for SiC deposition (2001)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 90 (2001), S. 619-636 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A reactor is proposed for plasma-enhanced chemical-vapor deposition of silicon carbide (SiC) at low pressure (∼few Torr). The inductively coupled plasma lies upstream of the growth substrate and serves to dissociate the precursor silane/propane/hydrogen inlet gas. Unlike existing reactors, the design offers the potential for separate control of the temperature in the dissociation region and at the growth substrate. The geometrical parameters and flow conditions appropriate for SiC growth are analyzed with a one-dimensional flow simulation model which includes approximations for lateral diffusive losses to cold walls as well as deposition to the substrate. Twenty-one neutral species and 24 ions are followed with 179 reactions. At 3 Torr, 10 W/cm3, and 300 cm/s inlet flow velocity, the model predicts a growth rate of ∼3 μm/h downstream from the plasma. Negligible ion density exists over the substrate as long as the silane density is sufficiently large due to a feedback process between Si+ and SiH4. Besides heating the gas, the plasma is an efficient source of radical H atoms, which in turn control the abundance of some hydrocarbon species over the substrate. C2H2 is the dominant contributor to the C-bearing flux onto the substrate and the Si atom, which forms by electron reactions, is the most important Si-bearing species. Finally, a sensitive transition in deposition rate is found for the C-bearing species as the power increases from 5 to 10 W/cm3. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1373701
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  • 2
    Electronic Resource
    Electronic Resource
    Electron energy distribution function and electron characteristics of conventional and micro hollow cathode discharges (2002)
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 9 (2002), S. 1815-1819 
    Details
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The conventional hollow cathode discharge, micro hollow cathode discharge, and the transition between them have been analyzed. The time independent and spatially averaged electron energy distribution function, electron density, mean electron energy, excitation, and ionization rates have been calculated and compared. The direct comparison showed substantial differences between the conventional and micro hollow cathode discharges, particularly in absorbed power per unit volume, degree of ionization, and excitation and ionization rates. © 2002 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1466819
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  • 3
    Electronic Resource
    Electronic Resource
    Electron energy deposition in an electron-beam pumped KrF amplifier: Impact of beam power and energy (2002)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 91 (2002), S. 2662-2677 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The electron deposition in an Ar–Kr–F2 mixture, based on a solution of the electron Boltzmann equation, is presented. The model is relevant to an electron-beam generated KrF* laser amplifier at atmospheric pressure. Sets of cross sections for Ar, Kr, and F2 have been compiled. Calculations have been performed to determine the electron energy distribution function, energy per electron–ion pair and the ionization and excitation rates. It is found that the inclusion of inner shell ionization and the subsequent Auger emission are essential for matching known results on both the energy per electron–ion pair Wei and the stopping power in pure Ar or Kr target gases. For the chosen Ar–Kr–F2 mixture, Wei is calculated to be 24.6 eV. The excitation-to-ionization ratio is calculated to be 0.38 for Ar and 0.54 for Kr at low input power density Pbeam (1 kW/cm3). Both ratios increase with Pbeam, particularly for Kr which attains 0.8 at 1 MW/cm3. The dependency on Pbeam and the excitation efficiency for Kr is significantly higher than previously assumed in KrF* kinetic models. Results are also compared with the continuous slowing down approximation to demonstrate that this approach is limited to the regime of low power deposition. © 2002 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1448409
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  • 4
    Electronic Resource
    Electronic Resource
    Cd–Ne direct current glow discharge: An efficient source of ultraviolet radiation (2000)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 77 (2000), S. 40-42 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: This investigation aims to present data of a potential light source based on Cd. Recent study of cadmium–neon direct current glow discharge at low and intermediate pressure showed that a significant fraction (∼80%) of the input power delivered to the plasma can be converted into resonance radiation, which leads us to conclusion that Cd can be an efficient light source, even more efficient than Hg. The conventional fluorescent lamps contain Hg, but environmental concerns urge for mercury-free light sources. The ultraviolet radiation from Cd(5p1P1) and Cd(5p3P1) resonance states has been investigated and the optimum discharge conditions of a potential light source are determined. At optimum discharge conditions 80%–87% of the input power is converted into resonance radiation. © 2000 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.126870
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  • 5
    Electronic Resource
    Electronic Resource
    Utilization of operational amplifiers for raising the input impedance of measuring circuits (1960)
    Springer
    Measurement techniques 3 (1960), S. 883-886 
    Details
    ISSN: 1573-8906
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology
    Notes: Summary The analysis and testing of a matching circuit consisting of two operational dc amplifiers have shown that it is possible by means of this circuit to match dc voltage circuits with a large internal resistance (up to 10 meg) to circuits with a small internal resistance (up to 10 kohm).
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00984310
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  • 6
    Electronic Resource
    Electronic Resource
    A simple kinetic model of a Ne-H2 Penning-plasma laser (1995)
    Springer
    Applied physics 61 (1995), S. 305-310 
    Details
    ISSN: 1432-0649
    Keywords: 42.55.Hz ; 52.25 ; 52.80. Sm
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract A simple kinetic model of the Ne-H2 Penning-Plasma Laser (PPL) (NeI 585.3 nm) is proposed. The negative glow of a hollow cathode discharge at intermediate pressures is considered as the active medium. The balance equations for the upper and lower laser levels, electrons, ions and electron energy are solved. The dependences of the laser gain on the discharge conditions (Ne and H2 partial pressures, discharge current) are calculated and measured. The calculated values are in a good agreement with the experimental data.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01082051
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  • 7
    Electronic Resource
    Electronic Resource
    Meridian observations of solar system bodies with the struveertel instruments of the Pulkovo Observatory (1991)
    Springer
    Astrophysics and space science 177 (1991), S. 339-340 
    Details
    ISSN: 1572-946X
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract Two Struve-Ertel instruments were used for the daytime observations of the Sun, Mercury, Venus and Mars at Pulkovo from 1956 to 1976. The FK4 equinox and equator corrections were derived. Both the instruments were installed in 1983–1986 at the Kislovodsk Station of the Pulkovo Observatory. The atmospheric dispersion and lateral refraction have been estimated at the Station.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00643701
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  • 8
    Electronic Resource
    Electronic Resource
    On the systematic errors of the determinations of the absolute orientation of the meridian marks (1991)
    Springer
    Astrophysics and space science 177 (1991), S. 269-270 
    Details
    ISSN: 1572-946X
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract The classical method of determination of the absolute azimuth (or Bessel's parameter “n”) can secure sufficiently precision for RA from observations of stars at high geographical latitudes during polar night only.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00643688
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  • 9
    Electronic Resource
    Electronic Resource
    Numerical Modeling of a He–N2 Capillary Surface Wave Discharge at Atmospheric Pressure (2000)
    Springer
    Plasma chemistry and plasma processing 20 (2000), S. 183-207 
    Details
    ISSN: 1572-8986
    Keywords: collisional-radiative model ; He–N2 plasma ; Boltzmann equation ; atmospheric pressure plasma ; surface wave
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Notes: Abstract A self-consistent steady-state spatially averaged collisional-radiativemodel in which the rate coefficients involving electrons are calculatedfrom the solution to the electron Boltzmann equation has been developedfor describing an atmospheric pressure plasma in helium–nitrogen(He–N2) mixtures. The influence of small nitrogenconcentrations (typically less than 1%) on the discharge characteristicsis studied and compared with available experimental data. It is foundthat nitrogen is highly dissociated and that the density of metastablehelium atoms is considerably reduced by the presence of nitrogen, evenat such low concentrations.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1023/A:1007065022725
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  • 10
    Electronic Resource
    Electronic Resource
    An Investigation of the Positive Column of a Cd–Ne Glow Discharge. I: Steady State (2000)
    Springer
    Plasma chemistry and plasma processing 20 (2000), S. 365-392 
    Details
    ISSN: 1572-8986
    Keywords: Glow discharge ; positive column ; Cd–Ne mixture ; modeling and measurements
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Notes: Abstract An investigation of cadmium-neon plasma in cylindrical axially homogeneouspositive column of a dc glow discharge at low and intermediate pressure ispresented. Electron impact excitation cross sections, heavy-particlecollision rate coefficients, and radiative decay rates for Cd–Nemixture have been assembled from the literature and summarized. Aself-consistent collisional-radiative model based on numerical solution ofthe electron Boltzmann equation coupled with a system of particle balanceequations for the electrons, excited atoms and ions, as well as the electronenergy balance equation, is developed. By this model, the electron energydistribution function, mean energy, electron density, electron mobility, anddiffusion coefficient, populations of Cd and Ne excited states and theapplied dc electric field are calculated. The populations of the excitedCd(5p3P0,1,2) atoms are measured using opticalabsorption spectroscopy. From these measurements the effective lifetime ofthe resonance state Cd(5p3P1) and the diffusioncoefficients of both metastable states Cd(5p3P0) andCd(5p3P2) are determined. The electron density isderived by probes measurements. The influence of the Cd vapor pressure anddischarge current on the main plasma characteristics is studied. Modelpredictions compare favorably with measured electron density and populationsof excited states in a wide range of discharge conditions.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1023/A:1007096312136
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