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  • 1
    Digitale Medien
    Digitale Medien
    Excitation by electrons and fast neutrals in nitrogen discharges at very high electric field to gas number density ratios (1997)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 81 (1997), S. 1601-1603 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: A Monte Carlo code for simulation of electron, ion and fast neutral transport was developed to model the spatial distribution of excitation under nonequilibrium conditions at very high electric field to gas number density ratios (E/N) and low currents. The code includes the most detailed representation of electron scattering and transport including the reflection and multiplication at the anode and simulation of ion and fast neutral transport for realistic geometry of the experiments of B. M. Jelenkovic and A. V. Phelps [Phys. Rev. A 36, 5310 (1987)] and V. T. Gylys, B. M. Jelenkovic, and A. V. Phelps [J. Appl. Phys. 65, 3369 (1989)]. A good agreement between the simulations and experimental data was achieved by using reasonable data for scattering cross sections from the literature. Simulations confirm the model proposed by A. V. Phelps, B. M. Jelenkovic and L. C. Pitchford [Phys. Rev. A 36, 5327 (1987)] of transport and excitation kinetics at very high E/N where fast neutral excitation is the dominant process for second positive (2+) band of nitrogen. © 1997 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.364089
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  • 2
    Digitale Medien
    Digitale Medien
    Surface recombination of atoms in a nitrogen afterglow (1994)
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 100 (1994), S. 8514-8521 
    Details
    ISSN: 1089-7690
    Quelle: AIP Digital Archive
    Thema: Physik , Chemie und Pharmazie
    Notizen: The surface recombination of nitrogen atoms in afterglow is studied by the time delay method, accompanied by the macrokinetic diffusive model. The method consists of the measurement of the dependence of the mean value of the breakdown time delay on afterglow period td=f(τ) and fitting of the data by the model that was developed. Excited N2(A 3∑+u) nitrogen molecules formed in the surface-catalyzed recombination on cathode produce secondary electrons. The electrons entering the interelectrode space determine the time delay in electrical breakdown. The time delay method is very efficient in nitrogen atom detection down to a natural radioactivity level. By fitting the calculated curve to the experimental data, we have: (1) shown that the nitrogen atom recombination on the glass container walls is second-order in N while the recombination on the copper electrode is the first order; (2) determined the value of the surface recombination coefficient for molybdenum glass; (3) determined the combined probability of N2(A 3∑+u) metastable formation by recombination at electrode surface and of secondary electron emission. Furthermore, we derive the adsorption isotherm of nitrogen atoms on molybdenum glass, the type of recombination mechanism and the dependence of the activation energy for desorption (or the heat of adsorption) on the fractional coverage.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.466750
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  • 3
    Digitale Medien
    Digitale Medien
    Optical emission spectroscopy of rf discharge in SF6 (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 67 (1990), S. 97-107 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: In this paper we present experimental results obtained for a rf discharge in SF6 and for SF6 with Ar and/or N2. The data for power dependence of some emission lines usually used in actinometry are acquired and their applicability and excitation kinetics discussed. We also present the spatial (time averaged) variations of some emission lines. From such data the spatial dependence of the high-energy tail of the electron energy distribution function may be obtained.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.345211
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  • 4
    Digitale Medien
    Digitale Medien
    Energy distributions of electrons in a low-current self-sustained nitrogen discharge (2001)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 90 (2001), S. 5871-5877 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Electron energy distribution functions (EEDF) in N2 Townsend discharges for E/N between 1 and 30 kTd (1 Td=10−21 V m2) were measured using a multigridded energy analyzer behind a small (0.1 mm) aperture in the graphite anode. Experimental results are further analyzed by applying Monte Carlo simulations in order to describe nonequilibrium transport in steady state Townsend discharges and to determine the origin of the observed EEDF features. Boundary effects at electrodes are described by allowing exact representation of absorption, reflection, and secondary electron production at the anode. It was found that it is necessary to include electron reflection and secondary electron production in order to model the low energy part of the observed EEDF. © 2001 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1415364
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  • 5
    Digitale Medien
    Digitale Medien
    Attachment of low-energy electrons to HCl (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 64 (1988), S. 1625-1631 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The electron-attachment rate constants of HCl diluted in Ar and N2 were measured as a function of the reduced electric field E/N. These data were converted to the electron-attachment cross section of HCl using the electron-energy distribution functions of pure Ar and N2. The dependence of the electron-attachment rate constant and the mean electron energy on the fraction of HCl in each buffer gas was investigated. A comparison of the current result with both available experimental data and theoretical calculations is made.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.341810
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  • 6
    Digitale Medien
    Digitale Medien
    Transient signals induced by laser irradiation of negative ions in hollow electrode discharges of Cl2 and HCl in N2 (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 68 (1990), S. 2649-2656 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: A technique for sampling negative ions in hollow-cathode and hollow-anode discharges of strongly electronegative gases is presented. The negative ions were mass analyzed to be Cl−, Cl−2, and Cl−3 for the discharge of Cl2/N2 mixture and Cl− for HCl/N2. The dependence of negative ion intensity on gas pressure and discharge voltage was investigated. Photodetachment of negative ions was used to induce photoelectron transient signals that probe ion concentrations. The transient signal indicates that negative ions originate in discharge, but not in the mass-analyzer region. Time dependence of the negative ion signal induced by laser irradiation was measured by a quadrupole mass analyzer and used to study the kinetics of charged particles responsible for the transport of laser-induced perturbation. The observed negative ion transient signal is a useful means for studying negative ion kinetics in plasma.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.346490
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  • 7
    Digitale Medien
    Digitale Medien
    Dissociative electron attachment to some chlorine-containing molecules (1989)
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 90 (1989), S. 3145-3152 
    Details
    ISSN: 1089-7690
    Quelle: AIP Digital Archive
    Thema: Physik , Chemie und Pharmazie
    Notizen: The electron-attachment rate constants of CH3Cl, C2H5Cl, and C2H3Cl in N2 and Ar were measured as a function of reduced electric field (E/N). These data and the previous data of SOCl2 and CCl2F2 were converted to the electron-attachment cross sections as a function of electron energy. The present results are compared with existing fragmentary data. The dissociative electron-attachment processes of the studied molecules are discussed.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.455916
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  • 8
    Digitale Medien
    Digitale Medien
    Low-energy electron attachment to BCl3 (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 67 (1990), S. 675-678 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The rate constants of low-energy electron attachment to BCl3 diluted in N2 are measured as a function of E/N at 1–11 Td, corresponding to mean electron energies at 0.4–1.0 eV. The negative ions produced by hollow-cathode discharges of either pure BCl3 or mixtures of BCl3 in N2 are mass analyzed to identify the products of electron attachment to BCl3. Only Cl− ion is found in the discharge media, although BCl−3 is observed at the applied voltage significantly lower than the breakdown voltage. The electron attachment processes of BCl3 are discussed.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.345771
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  • 9
    Digitale Medien
    Digitale Medien
    Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma (2000)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 77 (2000), S. 489-491 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Separation of the effects of rf sources used for biasing the wafer and for sustaining the plasma is studied by measuring the space profiles of net excitation rate of Ar(3p5) for a two-frequency capacitively coupled plasma as a representation of a typical oxide etcher. Measurements were performed in Ar and in CF4/Ar mixtures. For biasing supply operating at low frequency, 700 kHz, it was shown that the effect of the voltage becomes significantly smaller as the sustaining voltage is changed from high frequency, 13.56 MHz, to very high frequency (VHF), 100 MHz, and it even disappears for pulsed operation in mixtures. This is the result of the low dc self-bias at the VHF electrode that allows the high energy secondary electrons to leave the plasma without excessive contribution to ionization and dissociation. © 2000 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.127020
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  • 10
    Digitale Medien
    Digitale Medien
    Excitation of theC 3 П u state of N2 by an electron swarm (1983)
    Springer
    The European physical journal 309 (1983), S. 293-300 
    Details
    ISSN: 1434-601X
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Physik
    Notizen: Abstract In this paper we present data for excitation and quenching rate coefficients of the N2 (C 3 П u ) state as a whole and for itsv=0,v=1 andv=2 vibrational levels. The results have been obtained using a steady state non-selfsustained discharge in pure nitrogen (and also in a 95% N2+5% H2 mixture) and by absolute measurements of radiation from the gas. We also discuss in detail our experimental apparatus and procedure.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1007/BF01413832
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