ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A simple method capable of producing uniform, large-area cone arrays of carbon filmswas found in a planar inductively coupled RF plasma source. The technique employs a DC or RFbias to substrate holder. Si substrates were mechanically pretreated using diamond paste.Cone-shaped carbon crystals preferentially nucleate and grow on the scratches using relatively lowbias. Variation of the depositing conditions enables control of the cone density, geometry, andheight. The cone arrays are believed to can significantly improve the field emission properties andhave a tempting perspective in the microelectromechanical system (MEMS)
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/41/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.53-54.325.pdf
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