ISSN:
1432-0630
Keywords:
PACS: 7.60; 42.80; 82.65
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract. The observation of systematic variations of the shape of holes drilled along a line into polyimide by excimer laser-based mask imaging and ablation stimulated this investigations. Despite homogeneous illumination of the total line of holes in the mask, the exit diameters of the holes drilled in the inner part of the line were smaller with respect to those of holes situated near both ends of the line; the entrance diameters were all equal within experimental variation. It was found that plasma plume ejection from the holes leads to a cloud of material which is optically denser above the inner holes so that the excimer laser radiation is attenuated there stronger than above the outer holes.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003399900367
Permalink
