Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
60 (1989), S. 793-794
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
We describe a simple and efficient heating chamber which is useful for alloying metal-semiconductor contacts for Hall-effect measurements. Wafer sections up to 1 cm×1 cm can be heated to 750 °C within 2 min.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1141023
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