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  • 1
    Electronic Resource
    Electronic Resource
    Contribution of slow waves on production of high-density plasmas by m=0 helicon waves (1999)
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 6 (1999), S. 4759-4766 
    Details
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The contribution of the slow waves (SWs) on high-density plasma production by m=0 helicon waves is investigated in H2, D2, He, N2, Ne, Ar, and Xe plasmas. The density-jump is observed in all the gases used at optimum external magnetic fields B0. The measured plasma density np as a function of B0 peaks at a condition close to the lower-hybrid resonance in H2, D2, He, N2, and Ne, whereas, the measured dispersion relation indicates the excitation of helicon wave. Dispersion relation of electromagnetic waves is solved using dielectric tensor elements of a cold uniform plasma including ion terms, which shows two branches: the SW and fast (helicon) wave. The transition from the ionization by SWs, which are excited in the low-density plasma produced by an antenna induction field, to that by helicon waves has been predicted to explain the mechanism to produce the high-density plasma in the helicon wave discharges. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.873763
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  • 2
    Electronic Resource
    Electronic Resource
    Evolution of paired luminous rings in capacitive radio-frequency hydrogen discharges (1997)
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 4 (1997), S. 1179-1181 
    Details
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The temporal and spatial evolution of paired luminous rings is observed in pulsed capacitive radio-frequency (rf) hydrogen discharges. The time-resolved axial profile of the light intensity indicates that the outermost ring pairs near the electrodes start to appear earlier than the inner ones, and that only the left-side (right-side) rings of ring pairs turn on when the rf voltage applied to the left-side (right-side) electrode is positive. The physical mechanism to create the paired rings seems to be similar to that of the standing striations in dc glow discharges. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.872357
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  • 3
    Electronic Resource
    Electronic Resource
    Promising blue sensitive photodetectors using thallium bromide crystals (2000)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 71 (2000), S. 322-323 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Blue sensitive photodetectors have been fabricated from thallium bromide (TlBr) crystals for scintillation detection. Lu2SiO5 (LSO)/TlBr detectors consisting of 3 mm×4 mm TlBr photodetectors coupled to 2 mm×2 mm×4 mm long LSO scintillators have demonstrated energy resolutions of 34.5% and 25.5% full width at half maximum for 511 keV and 662 keV γ rays, respectively. © 2000 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1150149
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  • 4
    Electronic Resource
    Electronic Resource
    Studies of an expansion-type tandem rf bucket source (1990)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 61 (1990), S. 1256-1258 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A new rf source producing a large and uniform plasma with magnetic field-free geometry for neutral beam has been developed. The source consists of a small-diameter multiple-rf plasma generator and a bucket chamber as a plasma expansion section. The plasma density scaling, the spatial profile, and the ion beam extraction have been studied by using the single rf plasma generator. It was found that under the optimized conditions the plasma density and the profile in the expanded plasma were essentially ruled by qualities of the bucket chamber itself. The present rf source is promising for the application of large-volume positive-ion source or plasma processing.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1141221
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  • 5
    Electronic Resource
    Electronic Resource
    Studies of an expansion-type tandem rf bucket source : International conference on ion sources (1990)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 61 (1990), S. 398-400 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A new rf source producing a large and uniform plasma with magnetic field-free geometry for neutral beam has been developed. The source consists of a small-diameter multiple-rf plasma generator and a bucket chamber as a plasma expansion section. The plasma density scaling, the spatial profile, and the ion beam extraction have been studied by using the single rf plasma generator. It was found that under the optimized conditions the plasma density and the profile in the expanded plasma were essentially ruled by qualities of the bucket chamber itself. The present rf source is promising for the application of large-volume positive-ion source or plasma processing.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1141303
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  • 6
    Electronic Resource
    Electronic Resource
    Space and time-resolved measurements of plasma density by a lithium neutral beam probe in NBT-1M (1985)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 56 (1985), S. 1050-1052 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A lithium neutral beam probe has been improved for space and time-resolved measurements of plasma density in NBT-1M. A lithium neutral beam (4 keV, 10–30 μA) is injected into the plasma and photon flux emitted from the injected lithium atoms by electron impact excitation is detected. This cross section is not sensitive to the electron temperature in a wide range (10 eV〈Te 〈200 eV) and the photon flux intensity is proportional to the electron density. Typical spatial and temporal resolutions are 1 cm and a few milliseconds, respectively. Beam attenuation is not severe for plasmas with n1〈1014 cm−2 unless the ion temperature is very high (Ti 〉1 keV), where the attenuation through charge-exchange process becomes dominant. This method is not influenced by the magnetic field and can be applied to plasmas in any magnetic field configuration.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1138265
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  • 7
    Electronic Resource
    Electronic Resource
    Control of hydrocarbon radicals and film deposition by using a whistler wave discharge in range of radio frequency (1991)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 59 (1991), S. 2675-2677 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Production of hydrocarbon radicals is controlled by using a whistler wave discharge in range of radio frequency in a low pressure region (∼0.1 Pa). Plasma density of 1010–1013 cm−3, electron temperature of 2–20 eV is obtained for the discharge of the admixture of Ar and small content of source gases (CH4, C2H2, CO). Spectroscopic measurement indicates that densities of CH and H radicals and the deposition rate of amorphous carbon:H film increase with electron density, electron temperature, and source gas pressure. The etching effect of H atoms influences on the deposition rate and a high deposition rate (90 μm/h for CO/Ar discharge) is obtained even in a low neutral pressure discharge.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.105903
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  • 8
    Electronic Resource
    Electronic Resource
    Characteristics of the high density plasma production by m=0 helicon wave (1996)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 1695-1697 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The characteristics of the high density plasma production by the m = 0 azimuthal mode helicon wave is investigated. By varying the power of the applied radio frequency Prf two discharge modes exist; one is the low density mode (plasma density np〈1012 cm−3), at which the discharge is sustained not by a helicon wave but by the antenna induction field at low Prf; the other is the high density mode (np(approximately-greater-than)1013 cm−3), in which helicon wave is excited at high Prf; in between the two modes, np jumps more than an order of magnitude. The threshold Prf for the density jump is higher for the m = 0 mode than that of the m = +1 and −1 modes excited by the helical antenna. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.118001
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  • 9
    Electronic Resource
    Electronic Resource
    Control of antenna coupling in high-density plasma production by m=0 helicon waves (1998)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 73 (1998), S. 1643-1645 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Antenna coupling has been controlled in high-density plasma production by m=0 helicon waves using multiple-loop antennas and varying the phase and the distance between antennas. When two single-loop antennas are connected in series with the phase between the two being zero, threshold power for the density jump Pth is reduced by a factor of 2–3 compared with that of the one-turn loop antenna. This reduction in Pth is caused by the increase in antenna coupling at the lower plasma density. The observed differences in antenna coupling among different antennas have been examined by using a two-dimensional wave code. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.122232
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  • 10
    Electronic Resource
    Electronic Resource
    Efficient production of O+ and O− ions in a helicon wave oxygen discharge (1996)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 617-619 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: High density oxygen plasmas (ne=1010–1013 cm−3) are produced by a helicon wave discharge source with rf powers of 0.1–3 kW. Positive and negative ion species in the plasmas are measured by a time-of-flight mass spectrometer. The intensity ratio of O+ to O+2 increases with the electron density ne and is almost proportional to it in the region of ne=1010–1012 cm−3. When the electron density increases up to 8×1012 cm−3, the ratio becomes about 4. In a high density plasma of 1.3×1013 cm−3 obtained by mixing Ar gas, about 83% of the positive oxygen ions becomes O+. By using pulse modulation of the rf power, O− ions are mainly observed with remarkable increase in the afterglow. The maximum density of O− is about 3×1011 cm−3 at 30 μs after turning off the rf power of 0.85 kW and the decay time of O− is about 60 μs. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.117925
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