ISSN:
1432-0630
Keywords:
PACS: 42.80; 81.40Z; 81.60Z
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
3 by short ultraviolet laser pulses (0.5 ps, 248 nm) is presented. Gratings with a period of 360 nm and a modulation depth of 80 nm are fabricated on the sample surface by single-laser-shot exposure. The structures are projection imaged by a Schwarzschild objective in air. The modulation depth can be varied by applying multiple-pulse exposure.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390050617
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