ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A surface plasma source with Penning-type electrodes is developed to generate H− beams for ion projection lithography applications. The source presently runs in pulsed mode with a pulse width of about 1 ms and repetition rate of 10 Hz. The discharge and the extracted H− beam are maintained in stable, noiseless condition; gas pressure plays a critical role here. The maximum H− beam current density at the emission surface is about 1.7 A/cm2. Preliminary measurements suggest that the normalized brightness of the core beam is ∼1.7×1013 A/(m rad)2 and its perpendicular temperature is about 0.2 eV. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1147227
Permalink