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  • 1
    Electronic Resource
    Electronic Resource
    ECE diagnostic for the TARA tandem mirror machine using a fast-scanning Michelson interferometer (1986)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 57 (1986), S. 1965-1967 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: This ECE (electron cyclotron emission) diagnostic utilizes a fast-scanning Michelson interferometer to determine two parameters, the temperature and the loss cone angle, of the distribution function of the hot electrons (T(approximately-greater-than)100 keV) generated in the axisymmetric plug plasma of the TARA tandem mirror device. The radiation transport system employs a lens relay and a low-pass grating filter in order to transmit the synchrotron radiation over a spectral range of 2.9–18.6 cm−1. This enables us to study the emitted radiation spectrum up to the 40th harmonic of the electron–cyclotron frequency in the plug plasma (B=5 kG). Details of the design principles and the development of the diagnostic at TARA will be presented.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1138808
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Surface plasma source to generate high-brightness H− beams for ion projection lithography (abstract)a) : Proceedings of the 6th international conference on ion sources (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 927-927 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A surface plasma source with Penning-type electrodes is developed to generate H− beams for ion projection lithography applications. The source presently runs in pulsed mode with a pulse width of about 1 ms and repetition rate of 10 Hz. The discharge and the extracted H− beam are maintained in stable, noiseless condition; gas pressure plays a critical role here. The maximum H− beam current density at the emission surface is about 1.7 A/cm2. Preliminary measurements suggest that the normalized brightness of the core beam is ∼1.7×1013 A/(m rad)2 and its perpendicular temperature is about 0.2 eV. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1147227
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    Surface plasma source to generate high-brightness H− beams for ion projection lithographya) (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 1614-1617 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A surface plasma source with Penning-type electrodes is developed to generate H− beams for ion projection lithography applications. The source presently runs in pulsed mode with a pulse width of about 1 ms and repetition rate of 10 Hz. The discharge and the extracted H− beam are maintained in stable, noiseless condition; gas pressure plays a critical role here. The maximum H− beam current density at the emission surface is about 1.7 A/cm2. Preliminary measurements suggest that the normalized brightness of the core beam is ∼1.7×1013 A/(m rad)2 and its perpendicular temperature is about 0.2 eV. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1146897
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    Paper (German National Licenses)
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  • 4
    Electronic Resource
    Electronic Resource
    Efficient low-energy beam transport for intense, high-brightness H− beams in high energy accelerators: Perspectives and a solution using ESQ lensesa) (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1774-1777 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The characteristics of a 30 mA, 35 kV H− beam from a volume source have been determined using emittance measurements. A low energy-beam transport (LEBT) system consisting of six electrostatic quadrupole lenses and a short (about 5 cm long) single-stage einzel lens is designed with the aim of transporting the beam over a distance of about 30 cm and focusing a clean, matched beam into a radio-frequency quadrupole accelerator of the Superconducting Super Collider. The system parameters are chosen on the basis of simulation of beam dynamics. The emittance growth in the LEBT section is within a factor of about 1.5 and this satisfies the requirement of the emittance budget. The LEBT system is designed to be mechanically rugged.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1144824
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    Paper (German National Licenses)
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  • 5
    Electronic Resource
    Electronic Resource
    A novel ion beam monitor using Kapton foils (1998)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 69 (1998), S. 2182-2183 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Kapton foils can be used as a simple ion beam monitor. These foils act as a self-developing medium and quantitative information about the distribution of the striking beam can be obtained easily. The "burn" pattern on the film due to irradiation by the ion beam is analyzed to determine the beam distribution, here the beam power density distribution. Given the beam voltage this information can be translated to the ion current density distribution. The linearity of response of the Kapton foil with beam current density is shown. The threshold for response of the Kapton foil seems quite good; a clear response is observed with a foil of thickness=50 μm for H− beam current density of about 35 μA/cm2 at 88 kV. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1148920
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  • 6
    Electronic Resource
    Electronic Resource
    Simple emittance measurement of H− beams for neutral beam injectors in magnetic fusion (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 2534-2537 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A novel emittance meter is developed using the pepper-pot method. Kapton foils are used to detect intensity distributions of small beamlets at the "image'' plane of the pepperpot. Emittance of H− beams for the neutral beam injector of the large helical device has been measured. The normalized emittance (95%) of a 6 mA H− beam with an emission current density of about 10 mA/cm2 is ∼0.59 mm mrad. The present system is simple, and it eliminates many complexities of the existing schemes. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1147207
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  • 7
    Electronic Resource
    Electronic Resource
    H− beam based projection microlithography: A conceptual study of the beam parametersa) (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1745-1748 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The current trends of research and development work in ion-beam microlithography are examined with particular emphasis on the choice of ion sources and the beam parameters. The common approach with duoplasmatron-type ion sources for projection ion-beam lithography is revisited, and the suitability of H− beams is examined. The beam brightness and energy spread, which constitute the figure of merit of a beam, appear to be better in the case of H− beams. From a surface plasma source type discharge operating under stable condition, H− beams with an emission current density of ∼1–5 A/cm2 and a normalized brightness of ∼7×1012 A/(m rad)2 can be extracted. Several key issues of an ion-projection lithography device, such as the ion source parameters, beam optics, and thermal load are discussed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1144870
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  • 8
    Electronic Resource
    Electronic Resource
    H− beam based projection microlithography: A conceptual study of the beam parameters (abstract)a) : Proceedings of the 5th international conference on ion sources (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1310-1310 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The current trends of research and development work in ion-beam microlithography are examined with particular emphasis on the choice of ion sources and the beam parameters. The common approach with duoplasmatron-type ion sources for projection ion-beam lithography is revisited, and the suitability of H− beams is examined. The beam brightness and energy spread, which constitute the figure of merit of a beam, appear to be better in the case of H− beams. From a surface plasma source type discharge operating under stable condition, H− beams with an emission current density of ∼1–5 A/cm2 and a normalized brightness of ∼7×1012 A/(m rad)2 can be extracted. Several key issues of an ion-projection lithography device, such as the ion source parameters, beam optics, and thermal load are discussed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1144989
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    Paper (German National Licenses)
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  • 9
    Electronic Resource
    Electronic Resource
    Efficient low-energy beam transport for intense, high-brightness H− beams in high energy accelerators: Perspectives and a solution using ESQ lenses (abstract)a) : Proceedings of 5th international conference on ion sources (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1427-1427 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The characteristics of a 30 mA, 35 kV H− beam from a volume source have been determined using emittance measurements. A low energy-beam transport (LEBT) system consisting of six electrostatic quadrupole lenses and a short (about 5 cm long) single-stage einzel lens is designed with the aim of transporting the beam over a distance of about 30 cm and focusing a clean, matched beam into a radio-frequency quadrupole accelerator of the Superconducting Super Collider. The system parameters are chosen on the basis of simulation of beam dynamics. The emittance growth in the LEBT section is within a factor of about 1.5 and this satisfies the requirement of the emittance budget. The LEBT system is designed to be mechanically rugged.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1144932
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    Paper (German National Licenses)
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  • 10
    Electronic Resource
    Electronic Resource
    A 19-channel fast grating polychromator for ECE measurements in the MTX tokamak (1990)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 61 (1990), S. 3520-3523 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A 19-channel grating polychromator is developed to measure the temporal evolution of the electron cyclotron emission spectrum in the second and third harmonics in MTX tokamak with an aim to determine the electron temperature in ohmically heated thermal plasmas as well as the electron energy distribution function in gyrotron and free-electron laser-pumped nonthermal plasmas. The spectrometer can cover a spectral range of about 0.3 to 1.4 mm and deliver a maximum spatial resolution of about 1 cm radially. A combination of a 90° off-axis paraboloidal mirror as the collimating element and a toroidal mirror to focus the diffracted beam yields images on the exit slits with a modest astigmatic distortion. Liquid-helium-cooled InSb detectors are installed in nine channels and associated electronics are optimized for a very low noise and fast response time ( ∼ 2 μs). A faster detector element, with response 〈 100 ns, is envisioned for the remaining ten channels.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1141561
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