ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
Ni(60Å)/Cu film possessing perpendicular magnetic anisotropy (PMA) changes its easydirection into the plane by ion irradiation, due to the relaxation of the strain. By fixing our eyes uponthis magnetic property, the magnetic patterning of Ni(60Å)/Cu film using 40 keV O ion irradiationwas performed through the photo-resist (PR) mask having 10㎛ x 10 ㎛pattern sizes to pattern themagnetic film. After the PR mask removal of an irradiated film, the magnetic properties wereinvestigated by the magneto-optic Kerr effect and the formation of magnetic pattern was observed bythe magnetic force microscopy. The PMA magnetic patterning of epitaxial Ni/Cu film wassuccessfully performed in scale of ㎛ by using ion irradiation, compatible with device process
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/23/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.124-126.867.pdf
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