ISSN:
0268-2605
Keywords:
MOCVD
;
CVD
;
rare-earths
;
lanthanoids
;
organometallics
;
β-diketonates
;
superconductors
;
Chemistry
;
Organic Chemistry
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
Notes:
Three major applications have been found for rare-earth compounds in Metal Organic Chemical Vapour Depostion (MOCVD) or Chemical Vapour Deposition (CVD). Yttrium 2,2,6,6-tetramethyl-3,5-heptanedionates and 6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionates have been used in conjunction with barium and copper(II) β-diketonates to deposit YBa2Cu3O7-δ as superconducting thin films. Rare-earth fluorides and chlorides have been used for CFD doping of rare earths into MOCVD-deposited ZnS, whilst yttrium chloride has been used, with barium iodide and copper(I) chloride, to produce YBa2Cu3O7-δ superconducting material by CVD. Lanthanoid (Ln) tris(cyclopentadienyl) compounds, Ln(C5H5)3 or Ln(C5H4Me)3, have been used for doping of rare earths into 13-15 (III-V) semiconductors. Their volatility, structure/volatility relationships, and preparations are discussed. Possible alternative reagents and problems to be faced in doping 12-16 (II-VI) semiconductors are also considered.
Additional Material:
1 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/aoc.590040504
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