Library

X
feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
Filter
  • 2005-2009  (7)
Source
Material
Years
Year
  • 1
    Electronic Resource
    Electronic Resource
    Preliminary Study of the Apparatus for Electron Stimulated Desorption of Rare Gas Solids (2005)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 277-279 (Jan. 2005), p. 935-938 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: An electron stimulated desorption (ESD) experimental system consisting of a ultrahigh vacuum chamber, micro channel plate, electron gun, quadrupole mass spectrometer, liquid helium and liquid nitrogen cryostat, and a gas supply tube etc., was set up and evaluated in order to investigate desorption particles at the surface of rare gas solids (RGS). Ar was deposited on the copper sample for 200 seconds at a pressure of 6.3 x 10–4 Pa. Ion currents from the RGS duringbombardment at various electron gun energies were measured. These increased proportionally with filament currents between 1.5 A and 1.75 A. With the electron gun turned on, the dominant residual species in the vacuum chamber were H2O, H2, C, O, N2, Ar, and CO2, as measured using a quadrupole mass spectrometer (QMS). The H2O partial pressure was almost 50 % of the total pressure, and that of the other gas species were lower than 20 %. Before starting the experiments,the ultimate base pressure of the ultrahigh vacuum chamber reached 10–8 Pa
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/48/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.277-279.935.pdf
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 2
    Electronic Resource
    Electronic Resource
    Measurement of Outgassing in a Vacuum Environment (2005)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 277-279 (Jan. 2005), p. 831-837 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Outgassing, the evolution of gas from the material in a vacuum, is not only a source of micro contamination in a semiconductor or the flat display panel production process, but it also a limitation factor in the ultra clean process of nano-technology. The outgassing from the materials of satellites and spacecrafts must be controlled for increased safety and function because space is also a vacuum environment. Several methods are used in outgassing measurement in general, but there is no one method suitable for obtaining all outgassing data. The most suitable method for a particular application must be chosen by the experimenter or user. Three types of outgassing measurement systems were fabricated and characterized, ‘Throughput method,’ ‘Rate of Rise method’ and ‘Mass Loss Measurement method’. The outgassing rates of many kinds of materials were measured and characterized using these systems
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/48/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.277-279.831.pdf
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 3
    Electronic Resource
    Electronic Resource
    Enhanced Sensitivity of the Pirani Vacuum Gauge by the AC Driving Method (2005)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 277-279 (Jan. 2005), p. 990-994 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: We improved the sensitivity of existing commercial Pirani-vacuum gauges employingthe AC method in the vacuum range above 1 Torr. The signals obtained through the use of the AC method yield information related to the specific heat and heat conductivity of gas. The output signal is obtained by two components: the oscillating temperature amplitude, and its phase. The amplitude increases with the decrease of pressure in the vacuum range from the atmosphere to about 1 Torr, which arises from the decrease of the heat capacity with the decrease of gas density. In contrast, the phase decreases monotonically as pressure decreases and the slop of a dΘ/d(log P) is large at higher than 1 Torr. This provides a good advantage for developing a new Pirani gauge with high sensitivity
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/48/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.277-279.990.pdf
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 4
    Electronic Resource
    Electronic Resource
    Low Vacuum Generation and Control on BIEN Technology: Mass Flow and Dry Pumping Characteristics (2005)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 277-279 (Jan. 2005), p. 1000-1005 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Since a clean environment and finite mass flow control on the molecular level arecontinuously required in current R&D fields and actual process lines, technologies on vacuum generation and control have been playing a significant role in merging a variety of technologies like Bio, Information, Environment, Energy, Space and Nano.Currently, the drive towards dry vacuum pumping has broadly occurred across a spectrum of vacuum applications, from semiconductor manufacture to industrial processing, due to its most visible advantages: it is contamination free. The integrated characteristics evaluation system for dry vacuum pumps has been established in KRISS in collaboration with several branch dry pump suppliers in Korea. The evaluation system exploits a constant volume flow meter to measure mass flow rates real-timely in standard level, and facilitates the evaluation of spatially averaged sound power levels using a semi-anechoic chamber. New and overhauled roots, claw, classical screw, and scroll type pumps supplied from the manufacturers have been evaluated using the evaluation system in terms of ultimate pressure, pumping speed, vibration, and sound power. We selected the mass flow measuring method with a constant chamber volume of 875 L because of its direct monitoringcapability which does not allow blind mass flow rate measurements, and proved that the method allows us to measure five decades of mass flow rates from 1×10-2 to 1×103 mbar-l/s with a measurement uncertainty of ±3%, which is within the internationally accepted standards limit. In this work, we demonstrate how the integrated pump characteristics evaluation and mass flow control method have been significant in the low vacuum range of 10-4 to 103 mbar
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/48/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.277-279.1000.pdf
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 5
    Electronic Resource
    Electronic Resource
    A Method for Interpreting V-I Probe in a Capacitively Coupled Plasma Discharge (2007)
    s.l. ; Stafa-Zurich, Switzerland
    Solid state phenomena Vol. 124-126 (June 2007), p. 327-330 
    Details
    ISSN: 1662-9779
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Physics
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/02/23/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.124-126.327.pdf
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 6
    Electronic Resource
    Electronic Resource
    A Diagnostic Technique for the Inspection of Pipes in MOCVD System (2006)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 321-323 (Oct. 2006), p. 1636-1639 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: In examining particulate deposits in the pipes within a chemical vapor deposition (CVD)system, vibration diagnostics is compared and studied against ultrasonic diagnostics. The lattermethod involves pulsing the outer wall of pipes with an ultrasonic sensor and analyzing theresulting echo to observe particulate deposits inside pipes. Vibration diagnostics examines theexistence of particulate deposits by analyzing the difference in the frequencies generated when avibrator is adhered to the outer wall of pipes. With ultrasonic diagnostics, good test results wereobtained only when particulate deposits were attached to the inner wall of the pipes. After sometime, however, particulate deposits were not detected properly, as the ultrasonic wave failed to crossthe fine gaps created between the inner wall of the pipe and the deposits. In conclusion, thevibration diagnostics is being expected as the effective method in monitoring the particulatedeposits inside pipes in the CVD system where the desired behavior is reduced frequency alongwith the the particulate deposits in comparison to the case where the pipe is clean
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/52/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.321-323.1636.pdf
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 7
    Electronic Resource
    Electronic Resource
    The Effect of the Operational Conditions on the Quantitative Leak Rate of Leak Detectors (2006)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 321-323 (Oct. 2006), p. 1560-1563 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: The Korea Research Institute of Standards and Sciences has developed and maintained leakstandards systems, and has accumulated much data on leak standards that have been disseminatedduring calibration and testing services. We have found that the indicative value of a leak detector anda halogen leak detector varies a lot, depending on the conditions encountered during sniffer modeoperation. Therefore, to measure the reliability of the leak rate or when performing a leak test, propertest conditions are necessary. In addition, we found that the reliability increased when we used a guidetube that could influence the flow of air
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/52/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.321-323.1560.pdf
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...