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1

Digitale Medien

Plasma properties determined with induction loop probes in a planar inductively coupled plasma source (1996)

Meyer, J. A. ; Mau, R. ; Wendt, A. E.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 79 (1996), S. 1298-1302

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: Electromagnetic fields in a planar rf inductively coupled plasma source, of interest for materials processing, were measured using a two-loop inductive (B-dot) probe. The two loops were oriented to measure the time derivative of the axial and radial components of the magnetic field B(overdot)z and B(overdot)r, respectively, at various positions in the r–z plane of the cylindrically symmetric argon discharge. Maxwell's equations were used with this data to calculate amplitudes of the rf azimuthal electric field Eφ and current density Jφ, as well as the complex permittivity ε of the plasma, from which the electron density ne was calculated. The electron densities calculated using this technique were found to compare favorably to the results of measurements made with Langmuir probes. Electron drift velocities calculated from Jφ and ne were found to be comparable to electron thermal velocities in the region of highest Eφ and thus may contribute to local enhancement of electron impact reactions, thereby affecting process chemistry and uniformity. The peak in the drift velocity moved radially outward as the pressure increased due changes in the radial plasma density profile. This technique is applicable to chemistries where Langmuir probes are not practical. © 1996 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.361025

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2

Digitale Medien

Intersubband all-optical limiter based on thermally induced intervalley transfer (1997)

Meyer, J. R. ; Vurgaftman, I. ; Hoffman, C. A.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 81 (1997), S. 7662-7665

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: We propose an all-optical limiter based on the thermally induced intervalley transfer of electrons from Γ-valley states with forbidden normal-incidence intersubband interactions to L-valley states which absorb strongly. Detailed modeling of the device performance in the short-pulse regime (≤100 ns) yields that the output intensity for a limiter with only 10% insertion loss at low excitation levels will remain clamped over a dynamic range of 25–40.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.365344

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3

Digitale Medien

Quantitative mobility spectrum analysis of multicarrier conduction in semiconductors (1997)

Meyer, J. R. ; Hoffman, C. A.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 81 (1997), S. 709-713

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: We demonstrate an optimized quantitative mobility spectrum analysis (QMSA) technique for determining free electron and hole densities and mobilities from magnetic-field-dependent Hall and resistivity data. The procedure is applied to an In1−xGaxAs–In1−xAlxAs single quantum well, GaAs–AlAs asymmetric double quantum wells, and Hg1−xCdxTe epitaxial thin films containing multiple carrier species. The results illustrate the reliability, versatility, and sensitivity of the analysis, which is fully computer automated following input of the magnetic-field-dependent data. QMSA is found to be a suitable standard tool for the routine electrical characterization of semiconductor material and device transport properties. © 1997 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.364211

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4

Digitale Medien

Measurements of electromagnetic fields in a planar radio-frequency inductively coupled plasma source (1995)

Meyer, J. A. ; Wendt, A. E.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 78 (1995), S. 90-96

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: Electromagnetic fields in a planar radio-frequency inductively coupled plasma source were measured using an inductive loop (B-dot) probe. The probe was oriented to measure the time derivative of the axial component of the magnetic field (B(overdot)z). Using these measurements and Faraday's law, taking advantage of cylindrical symmetry, the time varying azimuthal electric field (Eφ) was calculated directly. Contour plots of B(overdot)z and Eφ in the r-z plane show that the radio-frequency electromagnetic fields penetrate further into the plasma at lower gas pressure and lower rf power, corresponding to less effective shielding of the fields at lower plasma density. Estimates of skin depth from the axial decay of the field amplitudes near the axis of the discharge are consistent with values calculated from plasma parameters measured with Langmuir probes, confirming that near the axis the degree of shielding is most strongly dependent on the local plasma density. Near the conducting walls of the chamber, the skin depth calculations from the Langmuir probe data diverge from the B-dot probe data. B-dot probe measurements taken in the absence of plasma show that near the walls of the chamber the axial decay of the field amplitude is partly a geometrical effect in addition to a plasma shielding effect. © 1995 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.360585

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5

Digitale Medien

Optimum growth parameters for type-II infrared lasers (1999)

Yang, M. J. ; Moore, W. J. ; Bennett, B. R. ; [weitere]

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 86 (1999), S. 1796-1799

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: The surface, structural, and optical properties of InAs/InGaSb/AlSb mid-infrared lasers grown by molecular beam epitaxy have been systematically studied, respectively, by Nomarski differential interference contrast, high-resolution x-ray diffraction, and variable-temperature photoluminescence. It is found that the optimum growth temperature is between 400 and 450 °C, based on the calibrated transmission thermometry. In addition, the impact of interfacial bond type and Sb sources has been investigated. A 5.91 μm laser, grown with the optimal growth parameters, exhibits a maximum cw operating temperature of 210 K. © 1999 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.370971

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6

Digitale Medien

Band parameters for III–V compound semiconductors and their alloys (2001)

Vurgaftman, I. ; Meyer, J. R.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 89 (2001), S. 5815-5875

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: We present a comprehensive, up-to-date compilation of band parameters for the technologically important III–V zinc blende and wurtzite compound semiconductors: GaAs, GaSb, GaP, GaN, AlAs, AlSb, AlP, AlN, InAs, InSb, InP, and InN, along with their ternary and quaternary alloys. Based on a review of the existing literature, complete and consistent parameter sets are given for all materials. Emphasizing the quantities required for band structure calculations, we tabulate the direct and indirect energy gaps, spin-orbit, and crystal-field splittings, alloy bowing parameters, effective masses for electrons, heavy, light, and split-off holes, Luttinger parameters, interband momentum matrix elements, and deformation potentials, including temperature and alloy-composition dependences where available. Heterostructure band offsets are also given, on an absolute scale that allows any material to be aligned relative to any other. © 2001 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.1368156

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7

Digitale Medien

High-speed spin-polarized intersubband lasers (1999)

Vurgaftman, I. ; Meyer, J. R.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 86 (1999), S. 4734-4739

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: Spin-polarized intersubband lasers based on optically pumped type-II antimonide quantum wells in a magnetic field are proposed. Complete discretization of the electron energy spectrum is predicted to extend the electron lifetime considerably. Continuous-wave room-temperature operation is projected for both interband and intersubband pumping configurations lasing at λ=16–24 μm. Furthermore, the parasitic capacitances associated with electrical injection are eliminated, and the large differential gain and fast intrinsic time scale should give modulation bandwidths in excess of 100 GHz. © 1999 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.371437

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8

Digitale Medien

Type-II quantum-well "W" lasers emitting at λ=5.4–7.3 μm (1999)

Stokes, D. W. ; Olafsen, L. J. ; Bewley, W. W. ; [weitere]

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 86 (1999), S. 4729-4733

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: A series of optically pumped type-II quantum-well "W" lasers with wavelengths ranging from 5.4 to 7.3 μm operated at temperatures up to at least 220 K for pulsed operation. The peak output power at 80 K was 1.1 W/facet for a device emitting at λ=7.0 μm. Internal losses were characterized for the temperature range between 40 and 190 K. Auger coefficients determined from an analysis of the threshold pump intensities were found to be suppressed by up to an order of magnitude compared to type-I III–V semiconductors with the same energy gaps. © 1999 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.371436

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9

Digitale Medien

Far-field characteristics of mid-infrared angled-grating distributed feedback lasers (2000)

Vurgaftman, I. ; Bewley, W. W. ; Bartolo, R. E. ; [weitere]

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 88 (2000), S. 6997-7005

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: The far-field emission characteristics of mid-infrared angled-grating distributed-feedback (α-DFB) lasers with W active regions are calculated using a self-consistent beam-propagation formalism that is more general than previous analyses. The theoretical projections are compared with the results of an experimental study of optically pumped α-DFB devices. Near-diffraction-limited beam quality is obtained both theoretically and experimentally for pump stripes ≤50 μm wide. While simulations employing the theoretical linewidth enhancement factor of 1.7 for the homogeneously-broadened W-laser gain spectrum predict that the good beam quality should be retained for stripes as wide as (approximate)200 μm, the data indicate a much more rapid degradation. That finding can be reproduced only by assuming that inhomogeneous broadening increases the structure's linewidth enhancement factor to (approximate)5. The experiments and theory also yield a steering of the output beam to off-normal angles as large as 6° when temperature tuning shifts the gain peak away from the grating resonance. © 2000 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.1326858

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10

Digitale Medien

Type-II quantum-well lasers for the mid-wavelength infrared (1995)

Meyer, J. R. ; Hoffman, C. A. ; Bartoli, F. J. ; [weitere]

Woodbury, NY : American Institute of Physics (AIP)

Applied Physics Letters 67 (1995), S. 757-759

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ISSN: 1077-3118

Quelle: AIP Digital Archive

Thema: Physik

Notizen: We discuss an improved mid-wave infrared diode laser structure based on InAs-Ga1−xInxSb- InAs-Ga1−xAlxSb Type-II multiple quantum wells. The proposed design combines strong optical coupling, 2D dispersion for both electrons and holes, suppression of the Auger recombination rate, and excellent electrical and optical confinement. © 1995 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.115216

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