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  • 1
    Digitale Medien
    Digitale Medien
    Soft magnetic properties of FeRuGaSi alloy films: SOFMAX (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 64 (1988), S. 772-779 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: To advance new soft magnetic materials of an FeGaSi alloy into the commercial world, improvements on various properties were designed by introducing additive elements without sacrificing its high saturation magnetic induction. The detailed studies on the diversified properties, such as saturation magnetic induction, film internal stress, wear resistivity, and so on, were performed. High-frequency permeability of the laminated structure film was also investigated. As a result, the Ru-added FeRuGaSi alloy films, whose typical compositions are Fe72Ru4Ga7Si17 and Fe68Ru8Ga7Si17 (at. %), prove to be excellent soft magnetic materials especially appropriate for the magnetic recording/playback head core use.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.341923
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  • 2
    Digitale Medien
    Digitale Medien
    High-frequency permeability in double-layered structure of amorphous Co-Ta-Zr films (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 63 (1988), S. 5424-5426 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The high-frequency permeability of amorphous Co-Ta-Zr films was studied and the frequency dependence was described in terms of the eddy-current-loss formula. For the double-layered structure intervened with SiO2 film, the degradation of the permeability became apparent with the decrease of SiO2 thickness.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.340362
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  • 3
    Digitale Medien
    Digitale Medien
    Magnetic and other properties and sputtering behavior of Co-base amorphous alloy films (1987)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 61 (1987), S. 2983-2992 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Magnetic and other properties of Co-base amorphous alloy films prepared by sputtering are investigated. A detailed magnetic phase diagram with saturation magnetic flux density, crystallization temperature, and zero-magnetostrictive line on Co-Ta-Zr amorphous alloys were obtained, and the technical knowhow to make a film with well-reproducible characteristics by widely changing the sputtering conditions was related with these physical properties. Especially on alloy sputtering, a phenomenological model for elucidating a composition difference between film and target is presented. After these studies, the film characteristics of Bs=12 kG, Tx=450 °C, ||λs||〈10−8, Hc〈10 mOe, and permeabilities of μ(1 MHz)=7000, μ(100 MHz)=2000 for the single film of 2 μm in thickness and of μ(1 MHz)=4000, μ(100 MHz)=800 for the insulator-sandwiched multilayered film of 10 μm are obtained, and these well-balanced values enable us to apply the materials for high-frequency recording head.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.337848
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  • 4
    Digitale Medien
    Digitale Medien
    Low resistance magnetic tunnel junctions and their interface structures (2001)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 89 (2001), S. 7558-7560 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Effects of interface structure and oxidation state were studied in stacked magnetic tunnel junction (MTJ) structures with top and bottom antiferromagnetic layers to obtain optimum resistance and high tunneling magnetoresistance (TMR) ratios for read heads. The roughness of the NiFe surface and the Al coverage were significantly improved by introduction of O2 surfactant gas on the Ta-seed-layer surface, which increased TMR ratios of the MTJ with low resistance area (RA) products of less than 10 Ω μm2. Furthermore, it was found that avoidance of Ni oxidation and Co oxidation at the tunnel barrier interface is essential to obtaining high TMR ratios, and that a good Al coverage and Fe–oxide formation may enhance TMR ratios when Fe-rich magnetic materials are used. For the top-type and bottom-type structures, a TMR ratio of 12%–17% with RA products of 6–7 Ω μm2 was obtained, which provides sufficient performance for read heads. © 2001 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1361054
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  • 5
    Digitale Medien
    Digitale Medien
    Large-area ion source combining microwaves with inductively coupled plasma : The 8th international conference on ion sources (2000)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 71 (2000), S. 716-718 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: The semiconductor industry is growing rapidly and requires high technologies for nano-structure devices. Ion sources for manufacturing the next-generation semiconductor devices have been studied from the viewpoint of applications to material processing, such as ion beam assisted deposition, ion beam etching, and ion implantation. Recently, large-area ion sources which extract broad ion beams with multiapertures have come to be required not only for processing the size-growing wafers but also for industrial applications to nonsemiconductor materials. However, the uniformity of plasma density over the multiaperture electrodes has not met the requirements yet. We suggest a new method to improve the uniformity by superposing microwaves to an inductively coupled plasma source. Distributions of ion species in the plasma are measured with a quadrupole mass spectrometer which can be moved in vacuum perpendicularly to the beam extraction. The distributions of both plasma density and ion species in the source plasma as well as their properties over a large area are being studied and discussed. © 2000 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1150271
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  • 6
    Digitale Medien
    Digitale Medien
    Perpendicular magnetic anisotropy and magneto-optical properties of evaporated (Fe,Co)–rare-earth amorphous binary alloy films (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 64 (1988), S. 5492-5494 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The dependence of perpendicular magnetic anisotropy on temperature and composition has been investigated for various (Fe,Co)–rare-earth amorphous binary alloy films prepared by evaporation. The temperature dependence of the perpendicular magnetic anisotropy is proportional to the third power of the rare-earth sublattice magnetization. The perpendicular magnetic anisotropy consists of two terms related to concentration. One is proportional to the rare-earth content and the other to its square. Both terms can be explained by a large rare-earth single-ion anisotropy.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.342310
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  • 7
    Digitale Medien
    Digitale Medien
    Improvement of microwave ion source for higher B+ ion current : The 8th international conference on ion sources (2000)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 71 (2000), S. 713-715 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: Microwave ion sources have many advantages over dc-discharge ion sources, such as long lifetime and high current for most ion species. But B+ ion current has been the only disadvantage. Here we experimentally study how to get higher B+ ion current by optimizing the shape and volume of the source chamber as well as by increasing the secondary electron emissivity of the chamber wall. We carry out the experiment with regard to the maximum ion beam, lifetime, and dynamic range of the beam current for various ion species. Then, we compare the data with those of the Bernas-type ion source that has been widely used in semiconductor manufacturing factories. As a result of the improvement, the performance of all the above-mentioned aspects of the microwave ion source exceed those of the Bernas-type ion source. © 2000 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1150270
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  • 8
    Digitale Medien
    Digitale Medien
    Charge exchange neutral particle mass and energy analyzer for the JT-60 tokamak (1985)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 56 (1985), S. 359-363 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: Design considerations and experimental results are described for a charge exchange neutral particle mass and energy analyzer for JT-60, which analyzes H, D, and He simultaneously up to a maximum energy of 110 keV. The analyzer has separately a 180° deflection magnet for momentum analysis and an electrostatic deflector for mass analysis. The way to control the effect of the electric fringe fields in order to expand the detectable energy range is studied by numerical simulation. The deflector is then designed, made of two triangular plates and three additional electrodes for the control of the fringe fields. The effect of the deflector is demonstrated experimentally. Energy and mass resolution and the relation between the incident ion energy and the magnetic field strength are measured. The results of the calibration experiments agree with the designed value.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1138303
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  • 9
    Digitale Medien
    Digitale Medien
    Dynamic characteristics of level and two-axis attitude detector using magnetic fluid (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 64 (1988), S. 6023-6025 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Level and attitude detectors are required for the detection of level and angles, for instance, in controlling the attitude of underwater robots, to keep solar cell panels directed constantly toward the sun, and the parabola antenna constantly toward the manmade satellite in communication systems. The usual angle detector can detect angle in one axis only, but the detector described in this paper is able to detect the angles of orientation with the horizontal and the vertical planes with a single unit. In addition, the new detector uses levels, such as water levels, by itself. This detector has three tubes with the magnetic fluid placed inside and with three coils. Its structure is very simple, small, and robust. It is also a light unit. The output signals are sine waves. The static operating characteristics of this detector were shown previously. The dynamic characteristics are presented in this paper.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.342138
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  • 10
    Digitale Medien
    Digitale Medien
    New crystalline soft magnetic alloy with high saturation magnetization (invited) (1987)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 61 (1987), S. 3514-3519 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Extensive study was made on Fe-base crystalline alloys in search for new soft magnetic materials with high saturation magnetization by means of sputtering technique. It revealed that newly found FeGaSi and FeAlGe alloy systems possessed excellent soft magnetic properties with remarkably higher saturation magnetization. These new alloy films, annealed in vacuum at 500 °C for 1 h, show the magnetic properties of Bs=13 and 15 kG, Hc=0.09 and 0.20 Oe, and μ1 MHz=2000 and 1800 for the FeGaSi and FeAlGe alloy films of 2 μm in thickness, respectively. These values are superior to those of FeAlSi (sendust) alloy which is a typical soft magnetic material with high saturation magnetization. Results of the Co-added systems of FeCoGaSi and FeCoAlGe alloys are also presented. Discussions are given on various systems of Fe base crystalline alloy films studied, which are classified into four types of groups with respect to magnetic softness.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.338712
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