ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A new apparatus for production of artificial compositionally modulated materials is presented. It consists of an ion gun that sputters from alternating targets on a rotating assembly, the position of which is controlled by a thickness monitoring crystal. The apparatus is simple, relatively inexpensive, and flexible, in that it allows deposition of metals, semiconductors, and insulators under the same conditions.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1138511
Permalink