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  • 1
    Electronic Resource
    Electronic Resource
    Monte Carlo simulations of electron distributions in the sheath region of reactive-ion-etching plasmas (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 1634-1643 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The results of a Monte Carlo model for calculating the trajectories of electrons in the plasma sheath region in reactive-ion-etching plasmas are described. The calculations illustrate how the oscillating movement of the sheath imparts energy to electrons and alters the electron energy distribution (EED) within the bulk of a 13.56 MHz Ar discharge. The study is limited to low-pressure discharges of less than about 10 mTorr, where the effects of electron-molecule collisions can be ignored. Under these conditions it is found that the sheath imparts energy preferentially to low-energy electrons. Calculated EEDs for electrons striking the electrodes in a radio-frequency reactor are also presented. Most electrons strike the electrodes with energies of a few eV, but some electrons strike the substrate surface with impact energies as high as 20 eV. This may be an important consideration when modeling etch mechanisms. Secondary electron emission caused by ion bombardment of the electrodes is also modeled. Simulated EEDs for secondary electrons that are produced at the electrodes and accelerated by the action of the sheath potential into the plasma region are presented. These electrons have energies of up to several hundred eV and are therefore important in plasma-sustaining mechanisms.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.353197
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  • 2
    Electronic Resource
    Electronic Resource
    Modeling radio-frequency discharges: Effects of collisions upon ion and neutral particle energy distributions (1992)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 71 (1992), S. 3721-3730 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Using a recently published description of the potentials in a radio-frequency discharge [Y. P. Song, D. Field, and D. F. Klemperer, J. Phys. D 23, 673 (1990)] Monte Carlo trajectories of ions and neutral particles for an Ar plasma have been computed, including collisions at the realistic pressures of tens of mTorr used for reactive ion etching. The model for collisions involves both charge exchange and momentum-transfer scattering. Ion and neutral energy and angular distributions have been calculated for particles impacting on the powered electrode and the calculations agree with an experimental ion energy distribution for Ar+. The presence of a large proportion of energetic neutrals is predicted, and it is suggested that these may have an important role to play in etch mechanisms.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.350882
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  • 3
    Electronic Resource
    Electronic Resource
    Ion energy distributions in radio-frequency discharges (1991)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 70 (1991), S. 82-92 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Using a theoretical description of potentials in radio-frequency (rf) discharges reported elsewhere [Song, Field, and Klemperer, J. Phys. D: Appl. Phys. 23, 673 (1990)] we derive the equations of motion for ions from the plasma region striking the cathode and anode in the absence of collisions in the sheath. We compute ion energy distributions (IEDs) which we find to be in excellent agreement with recent experimental data for Ar, Ar/H2 mixtures, O2, and CF4 parent gases. We also present a method of estimating IEDs which does not involve extensive computation, a development of particular value in the design of reactive ion etching processes.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.350247
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  • 4
    Electronic Resource
    Electronic Resource
    P–T conditions for the Arendal granulites, southern Norway: implications for the roles of P, T and CO2 in deep crustal LILE-depletion (1986)
    Oxford, UK : Blackwell Publishing Ltd
    Journal of metamorphic geology 4 (1986), S. 0 
    Details
    ISSN: 1525-1314
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Geosciences
    Notes: Abstract The orthopyroxene-clinopyroxene, garnet-orthopyroxene and garnet-clinopyroxene geothermometers, and the garnet-orthopyroxene-plagioclase, garnet-clinopyroxene-plagioclase and anorthite-ferrosilite-grossular-almandine-quartz geobarometers are applied to metabasites and the garnetplagioclase-sillimanite-quartz geobarometer is applied to a metapelite from the Proterozoic Arendal granulite terrain, Bamble sector, Norway. P–T conditions of metamorphism were 7.3 ± 0.5 kbar and 800 ± 60°C.This terrain shows a regional gradation from the amphibolite facies, into normal LILE content granulite facies rocks and finally strongly LILE deficient granulite facies gneisses. Neither P nor T vary significantly across the entire transition zone. The change in ‘grade’parallels the increasing dominance of CO2 over H2O in the fluid phase.LILE-depletion is not a pre-condition of granulite facies metamorphism: granulites may have either ‘depleted’or ‘normal’chemistries. The results presented herein show that LILE-deficiency in granulite facies orthogneisses is not necessarily related to variations in either P or T. The important mechanisms in the Arendal terrain were (a) direct synmetamorphic crystallization from magma, with primary LILE-poor mineralogies imposed by the prevailing fluid regime, and (b) metamorphic depletion, involving scavenging of LILEs during flushing by mantle-derived CO2-rich fluids. The latter process is constrained by U–Pb and Rb–Sr isotopic work to have occurred no later than 50 Ma after intrusion of the acid-intermediate gneisses, and was probably associated with contemporary basic magmatism in a tectonic environment similar to a present day cordilleran continental margin.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1111/j.1525-1314.1986.tb00344.x
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  • 5
    Electronic Resource
    Electronic Resource
    Optical spectroscopic study of mechanisms in CCl4 plasma etching of Si (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 67 (1990), S. 1525-1534 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The emission of Si, SiCl, Cl, Cl2, CCl, Cl+, and Cl+ 2 has been observed in a CCl4 rf discharge in the presence of Si(100) in a plasma etching system. Spectral intensities have been recorded over a wide range of process gas flow rates and rf powers. These data have been analyzed to show that (i) SiCl emission from the A˜ state arises through chemiluminescent reactions of metastable (1S) Si and (ii) the species which leaves the Si surface in the etching process is SiClx (x=0, 1, or 2) rather than SiCl3 or SiCl4. To arrive at these conclusions, detailed chemical models are examined and shown quantitatively to reproduce our observed variations of emission with flow and power.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.345663
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  • 6
    Electronic Resource
    Electronic Resource
    Low energy electron scattering in CF2Cl2 and CF3Cl (2001)
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 115 (2001), S. 3045-3052 
    Details
    ISSN: 1089-7690
    Source: AIP Digital Archive
    Topics: Physics , Chemistry and Pharmacology
    Notes: Experimental data are presented for the scattering of electrons by CF2Cl2 and CF3Cl for both integral and backward scattering, from 2 eV (for CF2Cl2) and 0.65 eV (for CF3Cl) down to energies of 10 meV to 20 meV, with an energy resolution ranging from 0.75 meV to 1.5 meV (full width at half maximum) in the electron beam. Both molecules have dipole moments of ∼0.5 D and are expected to show very similar rotationally inelastic scattering cross sections. Cross sections for CF2Cl2 are, however, much larger at low energy than for CF3Cl, attributed to short-lived attachment of electrons to CF2Cl2. CF3Cl displays powerful suppression of rotational excitation in the forward direction, most strongly around 70 meV impact energy. This is ascribed to interference between a direct channel of rotational excitation and indirect excitation via a short-lived negative ion state. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1387475
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  • 7
    Electronic Resource
    Electronic Resource
    The length of a tetranucleotide repeat tract in Haemophilus influenzae determines the phase variation rate of a gene with homology to type III DNA methyltransferases (2002)
    Oxford, UK : Blackwell Science, Ltd
    Molecular microbiology 46 (2002), S. 0 
    Details
    ISSN: 1365-2958
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Biology , Medicine
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1046/j.1365-2958.2002.03164.x
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  • 8
    Electronic Resource
    Electronic Resource
    Surface treatment studies aimed at streamlining fissure sealant application (1983)
    Oxford, UK : Blackwell Publishing Ltd
    Journal of oral rehabilitation 10 (1983), S. 0 
    Details
    ISSN: 1365-2842
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Medicine
    Notes: Three laboratory studies were carried out with the aim of improving or streamlining enamel surface treatment procedures in fissure sealing.In Study 1, the effect of reducing acid etch time from 60 s to 10 s was assessed by SEM and tensile bond strength measurements. Reduction in etch time produced a finer etch pattern, gave a reduced but still high, bond-strength, albeit with slightly poorer long-term adhesion.Study 2 showed that a conventional acid etch treatment could completely remove acquired pellicle, without prior prophylaxis. SEM studies and bond-strength measurements corroborated this view.In Study 3, compressed air and chemical drying agents were compared for drying speed and efficiency. Compressed air gave more rapid, thorough drying, and greater resultant bond strengths.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1111/j.1365-2842.1983.tb00125.x
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  • 9
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    Theory of American Government (1888)
    Boston, Mass., etc. : Periodicals Archive Online (PAO)
    The North American Review. 146 (1888:Jan./June) 543 
    Details
    ISSN: 0029-2397
    Topics: English, American Studies , History
    URL: http://gateway.proquest.com/openurl?url_ver=Z39.88-2004&res_dat=xri:pao:&rft_dat=xri:pao:article:3197-1888-146-00-000146
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  • 10
    Electronic Resource
    Electronic Resource
    The temperature dependence of the integrated X-ray diffracted intensities from sodium metal (1976)
    [S.l.] : International Union of Crystallography (IUCr)
    Acta crystallographica 32 (1976), S. 315-319 
    Details
    ISSN: 1600-5724
    Source: Crystallography Journals Online : IUCR Backfile Archive 1948-2001
    Topics: Chemistry and Pharmacology , Geosciences , Physics
    Notes: The temperature dependence of the integrated X-ray diffracted intensities in sodium metal has been determined for the 222, 400, 330, 411 and 332 reflexions in the temperature range 148 K to the melting point of 371 K. In the temperature range 148 K to about 300 K, all the data can be fitted using a quasi-harmonic approximation for the temperature factor. From room temperature to the melting point the intensities for all the reflexions were observed to decrease rapidly with temperature, and could not be fitted either with a quasi-harmonic or fourth-order anharmonic model for the temperature factor. There is no evidence for anisotropy in the intensities below room temperature, but from 293 K to the melting point, anisotropy increases rapidly. A qualitative explanation of the high-temperature phenomena in terms of a lattice relaxation around the vacancies has been advanced.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1107/S0567739476000697
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