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  • 1
    Digitale Medien
    Digitale Medien
    Ablation plume effects on high precision excimer laser-based micromachining (1999)
    Springer
    Applied physics 69 (1999), S. S137 
    Details
    ISSN: 1432-0630
    Schlagwort(e): PACS: 7.60; 42.80; 82.65
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Maschinenbau , Physik
    Notizen: Abstract. The observation of systematic variations of the shape of holes drilled along a line into polyimide by excimer laser-based mask imaging and ablation stimulated this investigations. Despite homogeneous illumination of the total line of holes in the mask, the exit diameters of the holes drilled in the inner part of the line were smaller with respect to those of holes situated near both ends of the line; the entrance diameters were all equal within experimental variation. It was found that plasma plume ejection from the holes leads to a cloud of material which is optically denser above the inner holes so that the excimer laser radiation is attenuated there stronger than above the outer holes.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1007/s003399900367
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 2
    Digitale Medien
    Digitale Medien
    Electron transfer in low energetic Ne2+/Ar, Kr collisions (1984)
    Springer
    The European physical journal 317 (1984), S. 139-143 
    Details
    ISSN: 1434-601X
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Physik
    Notizen: Abstract Single electron capture processes in Ne2+/Ar, Kr collisions were studied by aid of the high-resolution translational spectroscopy. At low collision energies (〈1 keV) the dominant contribution to the Ne+-spectrum arises from Ne2+ ions in the metastable1 S 0-state, although it is the weakest component of the primary Ne2+ beam. Ne2+(3 P) and Ne2+*(1 D) projectiles play no important role due to unfavourable energy defects. Target excitation processes as well as transfer ionisation are considered as a possible explanation for different structures in the measured Ne+ spectra.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1007/BF01421247
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 3
    Digitale Medien
    Digitale Medien
    Excimer laser beam homogenizer with low divergence (1999)
    Springer
    Applied physics 69 (1999), S. S315 
    Details
    ISSN: 1432-0630
    Schlagwort(e): PACS: 42.62.C; 42.55.L; 42.79
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Maschinenbau , Physik
    Notizen: Abstract. A new beam homogenizer device which leaves the beam parameter product almost unaffected is presented. Excimer laser beams usually show a nearly Gaussian beam profile along the short beam axis whereas along the long beam axis a nearly flat-top profile is provided. The new beam homogenizer efficiently converts the short beam axis into a top-hat profile featuring nearly the same divergence as the incoming laser beam. Depending on the output beam profile of the excimer laser the homogenizer presented provides a beam profile with a homogeneity of ±5% to ±10% within an area covering 65% to 70% of the total pulse energy.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1007/s003390051407
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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