ISSN:
1432-0630
Keywords:
PACS: 42.62.C; 42.55.L; 42.79
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract. A new beam homogenizer device which leaves the beam parameter product almost unaffected is presented. Excimer laser beams usually show a nearly Gaussian beam profile along the short beam axis whereas along the long beam axis a nearly flat-top profile is provided. The new beam homogenizer efficiently converts the short beam axis into a top-hat profile featuring nearly the same divergence as the incoming laser beam. Depending on the output beam profile of the excimer laser the homogenizer presented provides a beam profile with a homogeneity of ±5% to ±10% within an area covering 65% to 70% of the total pulse energy.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390051407
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