ISSN:
1089-7623
Quelle:
AIP Digital Archive
Thema:
Physik
,
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
A CCD-based, computer controlled RHEED detection and analysis system that utilizes an on-chip integration technique and on-board data manipulation is described. The system is capable of in situ time-resolved measurements of specular and integral-order intensity oscillations, their phase differences, streak linewidths, and epitaxial layer lattice constants. The digital RHEED techniques are described in the context of Co/Au bilayer, GaAs/GaAs, and InxGa1−xAs/GaAs MBE growth. The system is compared to other RHEED detection devices.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.1142483
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