ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We examined high-resolution diffraction profiles of as-grown and annealed magnetic-field-applied Czochralski (MCZ) silicon crystals which were about 300 μm thick and [001] oriented, and compared these profiles with the ultraplane wave x-ray topographs. Rocking curves for the symmetric 220 diffraction were measured in the Laue geometry using a (+m, −n, +n) separated three-crystal monochromator. Strain introduced in the sample preparation process gave a reduced oscillatory profile of a rocking curve although chemical etching recovered subsidiary peaks of the rocking curve. Strain frozen in as-grown crystals also gave a reduced oscillatory-profile, but a large number of oxygen precipitates produced by thermal annealing caused little reduction of subsidiary peaks.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.104940
