ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
An apparatus utilizing laser-induced fluorescence (LIF) has been developed to measure high-resolution angular distributions of sputtered neutral atoms. LIF provides sensitive detection, a feature necessary to monitor the low atomic fluxes inherent to angularly resolved sputtering measurements in the static sputtering regime. The apparatus incorporates a detector assembly which rotates about the sample in an ultrahigh vacuum (UHV) chamber, allowing a large range of angular measurements at different ion beam incidence angles. Laser light is brought to the detector in the UHV chamber via a single optical fiber and fluorescence photons exit the chamber via a fiber bundle. The optical fiber and fiber bundle are mounted in a fixed orientation on the detector, maintaining constant alignment as the assembly rotates. Angular resolution in the polar plane containing the incident ion beam and the surface normal is better than 3°. Angular resolution in the direction perpendicular to the polar plane is governed by the Doppler shift and is 0.028° for 3.2 eV atoms. Overall detection efficiency is estimated to be 5×10−9 counts per sputtered atom and 2×10−3 counts per atom entering the detection volume. Initial experiments using polycrystalline Zr to characterize the device are described.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1144215
