ISSN:
0049-8246
Keywords:
Chemistry
;
Analytical Chemistry and Spectroscopy
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
Application of the fundamental parameter method to the determination of film thickness by an EDX technique with a proportional detector was performed by considering that x-rays striking the detector were composed of the following kinds: (1) the analyte line of the film excited directly by the primary beam, (2) the analyte line of the film excited secondarily by scattered or characteristic x-rays from the substrate and (3) scattered and characteristic x-rays from the substrate which passed through the film to be analysed. The intensity of all these types were considered theoretically, and the film thickness was evaluated by fitting the theoretical intensity of the x-rays striking the detector to the experimental intensity, by use of an iteration process. In addition, the accuracy of the theoretical values of intensities excited secondarily was verified by comparison with the experimental values.
Additional Material:
4 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/xrs.1300130412
