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Digitale Medien

Instrumental Neutron Activation Analysis for Certification of Ion-Implanted Arsenic in Silicon (2000)

Greenberg, R. R. ; Lindstrom, R. M. ; Simons, D. S.

Springer

Journal of radioanalytical and nuclear chemistry 245 (2000), S. 57-63

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Details

ISSN: 1588-2780

Quelle: Springer Online Journal Archives 1860-2000

Thema: Chemie und Pharmazie , Energietechnik

Notizen: Abstract Standard reference material (SRM) 2134 Arsenic Implant in Silicon was produced at the National Institute of Standards and Technology (NIST) as a calibrant for secondary ion mass spectrometry. Instrumental neutron activation analysis was used as a primary method for certification of the arsenic implanted dose. A complete evaluation of all sources of uncertainty yielded an expanded relative uncertainty for the mean value of this SRM to be 0.38% at approximately the 95% level of confidence. No evidence indicating significant heterogeneity among samples was observed.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1023/A:1006703131599

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