Electronic Resource
Springer
Applied physics
63 (1996), S. 229-235
ISSN:
1432-0649
Keywords:
42.55
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Abstract An experimental investigation to improve the lifetime of a discharge-excited ArF-excimer laser is presented. The three dominant factors restricting its lifetime are CF4 generation in the laser gas, color-center formation in the optics and input power density reduction due to electrode ablation. Copper electrodes were superior to nickel electrodes in regard to electrode ablation. A gas lifetime of more than 109 shots (about one month at 400 Hz) is shown for an ArF-excimer laser with a liquid-nitrogen trap and high-temperature zirconium alloy trap.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01833791
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