ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Real time observation of SiC oxidation was performed using an in-situ ellipsometer overthe temperature range from 900°C to 1150°C. The relations between oxide thickness and oxidationtime were obtained precisely by virtue of the real time measurements. We analyzed the relationsbetween oxide thickness and oxidation time by applying the Deal and Grove model to obtain thelinear and parabolic rate constants. Taking advantage of in-situ measurements, we successfully obtainedthe oxidation rate constants with high accuracy
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/13/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.527-529.1031.pdf