ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
This article summarizes briefly our recent research on low-temperature synthesis of TiN,TiN/Cu and TiN/Si films by using inductively coupled plasma assisted magnetron sputtering method.It is shown that the incorporation of high-flux low-energy ion irradiation during deposition stronglyaffects film growth, structure evolution, morphology and mechanical properties. A main attention isdevoted to the synthesis of superhard nanocomposite films at a low deposition temperature. In bothTiN/Cu and TiN/Si films the maximum hardness reaches a value higher than 40 GPa
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.373-374.172.pdf