ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
Electrostatic microswitch and its fabrication technology have been developed for the firsttime in Lithuania, at Kaunas University of Technology (KTU). The microdevices were produced byusing a nickel surface micromachining process. The microswitch consists of a cantilevered nickelstructure suspended over the bottom electrodes. The width of the structure is 30 μm, thickness - 2μm and length ranges from 67 to 150 μm. Implementation of microswitches as a substitute for thepresent solid-state switching devices poses many problems. In particular higher actuation voltages,lower switching speed and a reduced lifetime are considered to be among the most significant ones.With the aim of improving these parameters a finite element model is currently developed that takesinto account not only microscale-specific electrostatic actuation and air damping effects but alsoincludes the bouncing phenomena. Experimental studies of electrical and dynamic characteristicswere also carried out with the purpose of model validation and correction. The paper presents initialresults of theoretical modal and air damping analysis as well it shows the first attempts to measurevibration modes of the cantilever structure of the microswitch using Laser Doppler vibrometer
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/22/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.113.179.pdf
