ISSN:
1662-0356
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Natural Sciences in General
,
Technology
Notes:
It has recently been demonstrated that it is possible to produce a pristine surface layer ona lapped sapphire substrate by depositing a thin film of aluminum and subjecting it to an appropriatethermal treatment. This process also shows promise for the fabrication of nanopatterned sapphireby pre-patterning the aluminum metal prior to thermal conversion to sapphire. We have exploredtwo distinct patterning processes: a dual layer photoresist e-beam lithography technique forfabricating arbitrarily shaped aluminum structures, and a novel, non-conventional mask-liftoffmethod involving nanoporous anodized aluminum oxide, useful for patterning very large scalearrays of sub-micron aluminum dots or posts. Our work is focused on refining the fabricationprocess and investigating the morphological stability of such metal nanostructures duringconversion to sapphire
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/42/transtech_doi~10.4028%252Fwww.scientific.net%252FAST.45.945.pdf