Bibliothek

X
feed icon rss

Ihre E-Mail wurde erfolgreich gesendet. Bitte prüfen Sie Ihren Maileingang.

Leider ist ein Fehler beim E-Mail-Versand aufgetreten. Bitte versuchen Sie es erneut.

Vorgang fortführen?

Exportieren
  • 1
    Digitale Medien
    Digitale Medien
    Study of C49-TiSi2 and C54-TiSi2 formation on doped polycrystalline silicon using in situ resistance measurements during annealing (1994)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 76 (1994), S. 7874-7881 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: In situ resistance versus temperature or time for reactions between 32 and 57.5 nm of titanium and undoped or doped polycrystalline silicon (boron, arsenic, or phosphorus, 7.9×1019–3.0×1020/cm3) has been measured and no clear correlation was found between the activation energy for the formation of the industrially important low-resistance C54-TiSi2 phase and its formation temperature. It is also demonstrated that with certain moderate doping levels typical of complementary metal-oxide-semiconductor manufacturing, boron or phosphorus-doped polycrystalline silicon can delay the formation of C54-TiSi2 more than arsenic-doped polycrystalline silicon. Finally, by using in situ resistance measurements, it is demonstrated that the "two-step'' thermal annealing process similar to a salicide process requires less thermal annealing time at high temperatures to form C54-TiSi2 than a single "one-step'' thermal anneal at the same temperature. © 1994 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.357897
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
    Artikel (Nationallizenzen)
    Volltext
  • 2
    Digitale Medien
    Digitale Medien
    The C49 to C54-TiSi2 transformation in self-aligned silicide applications (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 3566-3568 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: We show that when processing conditions closely mimic those used in the conventional self-aligned silicide process, the effective activation energy for the polymorphic phase transformation of orthorhombic base-centered (oC12) C49-TiSi2 to the low-resistivity orthorhombic face-centered (oF24) C54-TiSi2 phase is over 1 eV higher than previously reported literature values where a 1-step heat cycle was used. For C49-TiSi2 films formed at temperatures of 600 and 625 °C on (100) single crystal silicon substrates, the activation energy was determined to be 5.6±0.3 and 5.7±0.13 eV, respectively, for the transformation of this phase into C54-TiSi2 in the temperature range of 625–700 °C. The higher activation energy obtained with the simulation of the self-aligned silicide processing conditions suggests that the conventional processing may need to be modified for future semiconductor applications.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.352910
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
    Artikel (Nationallizenzen)
    Volltext
  • 3
    Digitale Medien
    Digitale Medien
    Kinetic analysis of C49-TiSi2 and C54-TiSi2 formation at rapid thermal annealing rates (1992)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 72 (1992), S. 4978-4980 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: We have used in situ resistance versus temperature measurements to demonstrate that a 60 nm titanium thin film on polycrystalline silicon heated at rates up to 3000 °C/min always forms high-resistivity base-centered orthorhombic C49-TiSi2 before the low-resistivity face-centered orthorhombic C54-TiSi2 phase. Kinetic analysis of the shift in transformation temperatures with heating rate indicates that the activation energies for the formation of C49-TiSi2 and C54-TiSi2 are 2.1±0.2 and 3.8±0.5 eV, respectively, when formed during the same annealing cycle. The higher activation energy of formation of C54-TiSi2 as compared to C49-TiSi2 suggests that under very high heating rates and annealing temperatures, the formation of C49-TiSi2 before C54-TiSi2 might be completely or partially bypassed.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.352018
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
    Artikel (Nationallizenzen)
    Volltext
  • 4
    Digitale Medien
    Digitale Medien
    Reduction of the C54–TiSi2 phase transformation temperature using refractory metal ion implantation (1995)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 67 (1995), S. 3729-3731 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: We report that the ion implantation of a small dose of Mo into a silicon substrate before the deposition of a thin film of Ti lowers the temperature required to form the commercially important low resistivity C54–TiSi2 phase by 100–150 °C. A lesser improvement is obtained with W implantation. In addition, a sharp reduction in the dependence of C54 formation on the geometrical size of the silicided structure is observed. The enhancement in C54 formation observed with the ion implantation of Mo is not explained by ion mixing of the Ti/Si interface or implant-induced damage. Rather, it is attributed to an enhanced nucleation of C54–TiSi2 out of the precursor high resistance C49–TiSi2 phase. © 1995 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.115364
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
    Artikel (Nationallizenzen)
    Volltext
  • 5
    Digitale Medien
    Digitale Medien
    Exact solutions of an algebraically extended Kaluza–Klein theory (1985)
    College Park, Md. : American Institute of Physics (AIP)
    Journal of Mathematical Physics 26 (1985), S. 2308-2316 
    Details
    ISSN: 1089-7658
    Quelle: AIP Digital Archive
    Thema: Mathematik , Physik
    Notizen: The four-dimensional field equations in an algebraically extended Kaluza–Klein theory are solved in the static spherically symmetric case. Eight distinct classes of solutions are found, some of which are free of singularities in both the metric and the electromagnetic field.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.526814
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
    Artikel (Nationallizenzen)
    Volltext
  • 6
    Digitale Medien
    Digitale Medien
    Nitrogen-15-labeled complexes of dinitridopentaammineruthenium(II) chloride (1974)
    s.l. : American Chemical Society
    Inorganic chemistry 13 (1974), S. 479-480 
    Details
    ISSN: 1520-510X
    Quelle: ACS Legacy Archives
    Thema: Chemie und Pharmazie
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1021/ic50132a050
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
    Artikel (Nationallizenzen)
    Volltext
  • 7
    Digitale Medien
    Digitale Medien
    Vapor-Liquid Equilibria at Atmospheric Pressure. I. 1-Butanol-Toluene System. (1963)
    s.l. : American Chemical Society
    Journal of chemical & engineering data 8 (1963), S. 189-190 
    Details
    ISSN: 1520-5134
    Quelle: ACS Legacy Archives
    Thema: Chemie und Pharmazie , Werkstoffwissenschaften, Fertigungsverfahren, Fertigung
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1021/je60017a013
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
    Artikel (Nationallizenzen)
    Volltext
  • 8
    Digitale Medien
    Digitale Medien
    Observations on the biology of the perch, Perca fluviatilis, in the River Stour, Dorset (1978)
    Oxford, UK : Blackwell Publishing Ltd
    Freshwater biology 8 (1978), S. 0 
    Details
    ISSN: 1365-2427
    Quelle: Blackwell Publishing Journal Backfiles 1879-2005
    Thema: Biologie
    Notizen: SUMMARY. Opercular bones from 323 perch from the River Stour were used for age and back-calculated growth determinations. Annuli were formed during May at the beginning of the growth period. Growth was minimal from October to April. Female perch grew faster than males, and the growth rates of both sexes were higher than those observed in most other European waters. Spawning occurred during late April and early May; male gonads began development in August and had attained their maximum weight in September, but the ovaries developed gradually from August until April. Immature perch had an annual cycle of condition with a maximum in June-July and a minimum in December-January. The condition of mature males and females was affected by the gonad cycle. The fecundity of Stour perch is expressed by the formula: log egg number = 2.40 log length (mm) - 1.34.Approximately 25% of males were mature at age I and all were mature at age II, whereas most females did not spawn until age III. Ephemeroptera nymphs and minnow fry constituted the bulk of the diet of 0-group perch; Ephemeroptera nymphs, minnow fry and Corixidae were the most numerous items in I group perch, whereas older perch contained Corixidae and a wider range of fish prey species, although minnows were the most numerous of these.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1111/j.1365-2427.1978.tb01444.x
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
    Artikel (Nationallizenzen)
    Volltext
  • 9
    Digitale Medien
    Digitale Medien
    The outcomes of pregnancy in women exposed to newly marketed drugs in general practice in England (1998)
    Oxford, UK : Blackwell Publishing Ltd
    BJOG 105 (1998), S. 0 
    Details
    ISSN: 1471-0528
    Quelle: Blackwell Publishing Journal Backfiles 1879-2005
    Thema: Medizin
    Notizen: Objective To determine the proportion and nature of congenital anomalies in babies born to women exposed to newly marketed drugs during the first trimester.Design Non-interventional observational cohort studies.Methods The women were identified in confidence by the Prescription Pricing Authority. The doctor was sent a questionnaire to determine clinical events, including pregnancy, occurring after the drug was dispensed. A supplementary questionnaire determined the outcome of each reported pregnancy.Setting General medical practice in England.Population Women exposed to newly marketed drugs in whom pregnancy was recorded.Main outcome measures Outcomes of pregnancies, the proportion and nature of congenital anomalies in the babies born.Results 2511 pregnancies were reported. In 831 of these pregnancies a newly marketed drug had been taken during the first trimester and in 74 during the secondkhird trimester. The outcome was ascertained for 780 (94%) of these 831 pregnancies: 547 (66%) births; 10 (1%) ectopic pregnancies; 94 (11%) spontaneous miscarriages; 5 (〈 1%) missed abortions; 120 (14%0) legal abortions; and 4 (C 1%) intrauterine deaths. 557 infants were born, of whom 14 (2.5%) had congenital anomalies.Conclusions The proportion of live infants with a congenital abnormality born to mothers exposed to newly marketed drugs in the first trimester was similar to the percentage of congenital anomalies estimated by the Ofice for National Statistics. These data add valuable information to the safety database of these drugs.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1111/j.1471-0528.1998.tb10234.x
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
    Artikel (Nationallizenzen)
    Volltext
  • 10
    Digitale Medien
    Digitale Medien
    The efficiency of a new electrofishing technique in determining fish numbers in a large river in Central Poland (1984)
    Oxford, UK : Blackwell Publishing Ltd
    Journal of fish biology 24 (1984), S. 0 
    Details
    ISSN: 1095-8649
    Quelle: Blackwell Publishing Journal Backfiles 1879-2005
    Thema: Biologie
    Notizen: A new method of determining fish numbers in a large river, which involved electrofishing from boats downstream to an AC electrical barrier, produced capture efficiencies for different species ranging from 28 to 82% when successive pairs of catches were combined. Estimates of population density, biomass and production for the 18 species in a 2.538 ha segment of the Pilica River, Poland revealed a decline in total numbers of the fish in species diversity between 1963 and 1980. This is attributed to increased fishing pressure, and to a loss in habitat diversity following the loss of many water mills and associated dams. The total production estimate of 0.85 g m−2 year−1 is low compared with the few published estimates for other large rivers. Roach, dace, chub, gudgeon and bream were the most numerous fish and they constituted 75% of the total population estimate, and 68% of the standing crop and annual production.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1111/j.1095-8649.1984.tb04788.x
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
    Artikel (Nationallizenzen)
    Volltext
Schließen ⊗
Diese Webseite nutzt Cookies und das Analyse-Tool Matomo. Weitere Informationen finden Sie hier...