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Enhanced formation of the C54 phase of TiSi2 by an interposed layer of molybdenum (1996)

Mouroux, A. ; Zhang, S. -L. ; Kaplan, W. ; [et al.]

Woodbury, NY : American Institute of Physics (AIP)

Applied Physics Letters 69 (1996), S. 975-977

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ISSN: 1077-3118

Source: AIP Digital Archive

Topics: Physics

Notes: The phase formation during rapid thermal annealing of a Ti/Mo bilayer sequentially deposited on Si substrates has been studied. The Mo layer varied from 0.5 to 2 nm and the Ti layer was always 60 nm thick. The presence of the Mo interposing layer enhances the formation of the C54 of TiSi2 by first forming a Mo-bearing silicide phase of hexagonal structure. The desired C54 phase then nucleates and grows on top of this Mo-bearing silicide phase at a temperature as low as 650 °C via Si diffusion through the growing silicide layers. This is about 100 °C lower than what is usually needed for the C49–C54 transformation. The significance of this finding is that the usual route for the formation of TiSi2, i.e., the C49 phase forms as a result of the Ti–Si interaction and the C54 phase forms as the product of phase transformation, is altered by the interposition of a thin refractory metal (here Mo) layer between Ti and Si. © 1996 American Institute of Physics.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.117100

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Faster GC analyses performed by flow programming in short capillary columns (1979)

Nygren, S.

Weinheim : Wiley-Blackwell

Journal of High Resolution Chromatography 2 (1979), S. 319-323

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ISSN: 0935-6304

Keywords: Gas chromatography ; Capillary, glass ; Mobile phase flow programming ; Comparison with temperature programming ; Short capillaries offer considerable shorter analysis time when flow programmed ; Chemistry ; Analytical Chemistry and Spectroscopy

Source: Wiley InterScience Backfile Collection 1832-2000

Topics: Chemistry and Pharmacology

Notes: The technique of programming the carrier gas flow rate in gas chromatography, especially in connection with the use of capillary columns shorter than 10 m can significantly accelerate GC analyses. Equations for calculation of the parameters of the exponential flow function and retention data are described. The effects of flow programming in a short capillary column are shown in a few chromatograms. Different programming rates are tested and compared with temperature programming.

Additional Material: 7 Ill.