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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 62 (1987), S. 2044-2049 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The dissociation of chlorosilanes to microcrystalline silicon and its deposition on a solid substrate in a rf plasma of mixtures of argon and hydrogen was investigated as a function of the macrovariables of the plasma. The dissociation mechanism of chlorosilanes and HCl as well as the formation of silicon in the plasma state were studied by sampling the plasma with a quadrupole mass spectrometer. Macrovariables such as pressure, net rf power input, and location in the plasma reactor were found to strongly influence the kinetics of dissociation. The deposition process of microcrystalline silicon films and its chlorine contamination were correlated to the dissociation mechanism of chlorosilanes and to the role of hydrogen chloride.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 68 (1990), S. 5409-5414 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A two-dimensional, time-dependent analysis is made of array-compatible bolometers directly deposited onto a single substrate. It applies both to antenna-coupled and surface-absorbing configurations. Unlike previous spherically symmetric treatments, it allows analysis of thermal crosstalk between closely neighboring detectors, and of the effects of finite substrate thickness. In a closely packed array of surface-absorbing detectors, thermal crosstalk generally degrades the array's resolution more severely than optical (diffractive) crosstalk. Diffraction-limited resolution with surface-absorbing detectors is possible only by sacrificing either thermal resistance, and therefore sensitivity, or filling factor. With a minimum substrate thickness of Lmin, a closely packed, diffraction-limited array is limited to a thermal resistance of Zt≤0.08(κLmin)−1, where κ is the thermal conductivity of the substrate. An array of antenna-coupled bolometers is not subject to this limitation since the thermally and optically sensitive areas need not be equal.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Fluids 8 (1996), S. 3218-3228 
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: In this work we examine a system of inelastic particles confined to move on a line between an elastic wall and a heat source. Solving a Boltzmann equation for this system leads to an analytic expression for steady state behavior. Numerical simulations show that the system is in fact capable of simultaneously displaying both the uniform density of the analytic solution, and a state in which the particles are collected into a cluster adjacent to the elastic wall. The boundary conditions for the Boltzmann treatment are then reworked to provide a theoretical description of how smooth particle distributions and clumping phenomena can coexist. From this, we gain a prediction for the time scale of clump formation in this system. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 62 (1987), S. 4587-4590 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: In situ x-ray photoelectron spectroscopy measurements of both W(100) crystals and sputter-deposited tungsten films exposed to a molecular beam of XeF2 with and without an accompanying argon ion beam have yielded the fluorine coverage and the chemical states of the adsorbed fluorine as a function of temperature, exposure, and ion dose. WF, WF2, WF3, and WF4 were found to exist on the tungsten surfaces. Room and elevated temperature exposures of clean tungsten resulted in the surface population of mainly WF species with WF4 observed on nonannealed samples. Ion dose promoted the formation of higher fluorine coordination species from the WF leading to the formation of volatile WF6 and thus resulting in ion-enhanced etching of tungsten.
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 74 (1999), S. 4043-4045 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We report the design and testing of an analog superconducting time-division multiplexer to instrument large format arrays of low-temperature bolometers and microcalorimeters. The circuit is designed to multiplex an array of superconducting quantum interference devices, thereby simplifying wiring and room temperature electronics. We have fabricated a prototype 8×1 multiplexer chip and show a switching rate of 1 MHz. We calculate that a 32×32 array or larger is feasible. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 2125-2127 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: High-temperature superconducting bolometric infrared detectors offer the promise of matching the sensitivity of HgCdTe detectors, but with an extended detection range to longer wavelengths (λ(approximately-greater-than)15μm). We fabricated high-temperature superconducting bolometers using an all-epitaxial micromachining technology based upon a YBa2Cu3Ox thin film on a yttria-stabilized zirconia free-standing 50×50μm2 membrane supported on a LaAlO3 substrate. This structure has simultaneously a low thermal conductance and a low heat capacity. Using this technology, we have made array-compatible pixels for infrared camera applications with optical noise equivalent powers as low as 6.3×10−13 W/(square root of)Hz at 32 Hz. Over more than 1 octave of frequency range, these bolometers are limited by fundamental (chiefly phonon) noise sources rather than excess film noise. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 7
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 68 (1996), S. 1214-1216 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The role of ion energy over the range 5 eV≤E≤20 keV in the production of the dense diamondlike sp3-bonded phase of carbon films deposited from ion beams has been investigated. Films with a significant sp3 component ((approximately-greater-than)40%), as determined by electron energy loss spectroscopy (EELS), can be formed over the wide energy region 30 eV≤E≤10 keV at room temperature. The sp3 fraction is completely suppressed only for E≤10 eV or E≥20 keV. For both cases, this suppression is associated with a sharp increase of the surface roughness, as determined by atomic force microscopy (AFM). The different nature of the mechanisms responsible for the suppression of sp3 bonding in both the low and high energy regions is discussed. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 8
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 63 (1993), S. 1984-1986 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have fabricated step edge superconductor-normal metal-superconductor microbridges using YBa2Cu3O7−x(YBCO) and noble metals with critical current-normal resistance (IcRN) products as high as 10 mV and normal resistances up to 38 Ω. Our fabrication process achieves high values of the IcRN product by exploiting the anisotropy in the properties of epitaxial YBCO films, allowing contact only between normal metal and superconductor through the crystalline axes which support the largest Josephson coupling. This results in a dramatic increase in the normal resistance of a junction without decreasing its critical current. We discuss the role of the superconductor-normal metal boundary resistance on the junction electrical properties. We have coupled submillimeter wave rf currents quasioptically into junctions integrated at the feeds of noble metal planar log periodic antennas and have induced up to 7 Shapiro steps in the current-voltage characteristics with a 760 GHz beam from a far infrared laser.
    Type of Medium: Electronic Resource
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  • 9
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 59 (1991), S. 3225-3227 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have extended the high efficiency of lithographic antennas to mid-infrared wavelengths. Pattern measurements made at 9.5 μm wavelength on a 65°, self-complementary, spiral antenna exhibit a ratio of response to orthogonal linear polarizations of 1.35 dB, a beamwidth of 85° (3 dB full width), a directivity of 8.2 dB, and surprisingly, a close resemblance to the theoretical pattern for a 65° spiral in free space. Direct detection measurements made with an ambient temperature blackbody source yield an antenna efficiency of 52±7%, when corrected for incomplete filling of the antenna beam by the source, at a mean effective wavelength of 19 μm.
    Type of Medium: Electronic Resource
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  • 10
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 65 (1994), S. 773-775 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: An antenna-coupled high-Tc superconducting microbolometer on a silicon substrate, operating at infrared wavelengths, is described. This detector incorporates a silicon-micromachined yttria-stabilized zirconia air bridge at the feed of a planar lithographic antenna to simultaneously minimize the thermal conductance and the heat capacity of the bolometer. At an operating temperature of 87.4 K, the optical responsivity measured using a 300-K blackbody source over a 0.2–2.9 THz bandwidth is 2900 V/W, the optical noise-equivalent power (NEP) is 9×10−12 W/Hz1/2, and the time constant is 〈10 μs. This NEP is nearly a factor of 2 lower than the previous record for a liquid-nitrogen-cooled thermal detector, and the time constant is several orders of magnitude shorter.
    Type of Medium: Electronic Resource
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