ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The recombination velocity at oxide–GaAs interfaces fabricated by in situ multiple-chamber molecular beam epitaxy has been investigated. Ga2O3, Al2O3, SiO2, and MgO films have been deposited on clean, atomically ordered n- and p-type (100) GaAs surfaces using molecular beams of Ga–, Al–, Si–, and Mg oxide, respectively. Based on the internal quantum efficiency measured for incident light power densities 1≤P0≤104 W/cm2, the interface recombination velocity S has been inferred using a self-consistent numerical heterostructure device model. While Al2O3–, SiO2–, and MgO–GaAs structures are characterized by an interface recombination velocity which is comparable to that of a bare GaAs surface ((approximately-equal-to) 107 cm/s), S observed at Ga2O3–GaAs interfaces is as low as 4000–5000 cm/s. The excellent Ga2O3–GaAs interface recombination velocity is consistent with the previously reported low interface state density in the mid 1010 cm−2 eV−1 range. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.116652
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