ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Reactions of thin Co55 W45 films in contact with Si(100) substrates and aluminum overlayers annealed in vacuum in the temperature ranges of 625–700 °C and 500–600 °C, respectively, and of thin Co55W45 films in air from 500 to 600 °C were investigated by Rutherford backscattering spectrometry, glancing angle x-ray diffraction, and scanning electron microscope techniques. CoW alloy films were amorphous and have a crystallization temperature of 850 °C on SiO2 substrates. The compound formed is Co7 W6. Phase separations were found in all the reactions. A layer of cobalt compounds (CoSi2 in Si/CoW, Co2 Al9 in CoW/Al, and Co3 O4 in CoW with air) was found to form at the reaction interfaces. In addition, a layer of mainly tungsten compounds (WSi2 in Si/CoW, WAl12 in CoW/Al, and WO3 in CoW with air) was found next to cobalt compound layers, but further away from the reaction interfaces. The reactions started at temperatures comparable to those required for the formation of corresponding tungsten compounds.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.342885
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