Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
74 (1999), S. 1165-1167
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We have generated the thin-film ternary composition spread of (Ba1−x−ySrxCay)TiO3 on an equilateral-triangle-shaped LaAlO3 substrate. Compositional variation within the triangle was achieved by a precisely controlled shutter system inside a pulsed laser deposition chamber, which allows the deposition of precursors with gradient thickness over the length of the substrate. Appropriate postannealing afforded high-quality epitaxial thin films over almost the entire composition region. Mapping of the microwave dielectric properties of the composition-spread chip was performed using a scanning evanescent microwave microscope at 1 GHz. Composition region Ba0.12–0.25Sr0.35–0.47Ca0.32–0.53TiO3 was found to have desirable properties for electronic applications. © 1999 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.123475
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