ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Based on the push–pull mechanism, we have developed a piezoelectric micropositioner, with a new mechanical construction. The positioner is basically composed of two piezoelectric actuators as the source of the motion and three permanent magnet feet to produce enough friction force for clamping. The movement of more than 5 mm with the steps of 150–700 nm at the speed of 50–200 steps per second can be accomplished by applying very low driving voltage to the positioner. The absence of clamping voltage in this positioner makes it well suited for use in ballistic electron emission microscope (BEEM). A BEEM operated in a gas-controlled environment based on it has been built and its performances have been tested. © 1997 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1148030
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