ISSN:
1432-1858
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Technology
Notes:
Abstract Photolithographic preparation of thin films and stacks of them were combined with anisotropic silicon etching and free standing film technology in order to realize three dimensional micro components for studies in detection and optimization of biomolecules. A polymer based SFM sensor was developed and tested in the measurement of thin film roughness and in the detection of holes in molecular films as well as in the detection of single DNA molecules. This “novolever” shows surprisingly high mechanical stability and provides high resolution SFM images of sensible molecules. Experimental arrangements of miniaturized chemical parallel processing for combinatorial and evolutionary synthesis strategies including silicon micro compartment arrays with free standing optical membranes and thin film filters have been proposed and the manufacturing of micro compartment arrays is described.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01371496
Permalink
