ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
Hybrid experimental – numerical techniques are applied to the problem of theinterpretation of patterns of fringes that are generated by non-contact full-field experimentalmethods applied for analysis of dynamic displacement fields of MEMS components. It is shownthat even rather simple cantilever beam of a MEMS switch can exhibit complex dynamical responsedue to the nonlinearities of interactions and the surrounding noise. In many instances theinterpretation of experimental results is possible only after numerical simulation of MEMScomponents in virtual computational environments
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/22/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.113.73.pdf
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