ISSN:
1572-896X
Keywords:
MEMS
;
scanning probe microscopy
;
electron-beam lithography
;
dust particles
;
space applications
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
,
Technology
Notes:
Abstract Micro-electromechanical systems are ideal tools for nano-science because they bridge the gap between the nano- and the macro-world. Moreover, several of these instruments can be operated in parallel to either increase the throughput or to provide redundancy. The majority of the components of such a system have dimensions above the nanometer scale. Still, some require placement and pattern accuracy well below this limit. This will be highlighted in a short review of a few examples: Scanning optical near field microscope probe fabrication, where an aperture of 50 nm in diameter was incorporated at the probing tip; parallel scanning force microscope for measuring dust particles on Mars where redundancy is essential; and a miniaturized electron column for parallel electron beam lithography, where the throughput needs to be increased.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1010026531885
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